Patents by Inventor Jia S. Fan

Jia S. Fan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cathode assembly for cathodic sputtering apparatus
    Patent number: 5269899
    Abstract: Elastic and plastic deformation of backing plate members in target-backing plate cathode assemblies for cathodic sputter coating apparatus are minimized by the provision of a concave surface portion located at the target/backing plate interface and by provision of a backing plate material having a yield strength of at least about 35 ksi.
    Type: Grant
    Filed: April 29, 1992
    Date of Patent: December 14, 1993
    Assignee: Tosoh SMD, Inc.
    Inventor: Jia S. Fan