Patents by Inventor Jiangjiao ZU

Jiangjiao ZU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210341847
    Abstract: A method and apparatus for analyzing a parameter of a mask plate is provided. A detection parameter of at least one mask pattern is acquired, and the detection parameter includes a deviation coordinate between a measurement coordinate of each alignment mark in a mask pattern manufactured with a mask plate and a preset coordinate of each alignment mark in a layout of the mask pattern. A direction and a vector length of a deviation vector of the deviation coordinate of each alignment mark in the mask pattern are acquired according to the detection parameter. Quality analysis data of the mask plate is generated according to the direction and the vector length of the deviation vector of each alignment mark in the mask pattern.
    Type: Application
    Filed: July 13, 2021
    Publication date: November 4, 2021
    Inventor: Jiangjiao ZU