Patents by Inventor Jiangtao PEI

Jiangtao PEI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Bottom electrode assembly, plasma processing apparatus, and method of replacing focus ring
    Patent number: 12094693
    Abstract: Disclosed are a bottom electrode assembly, a plasma processing apparatus, and a method of replacing a focus ring, wherein the bottom electrode assembly comprises: a base for supporting a wafer to be processed; a focus ring provided surrounding the outer periphery of the base; a cover ring disposed beneath the focus ring, a plurality of recesses being arranged along the circumferential direction of the cover ring; moving blocks provided in the recesses, an inner top corner of each moving block being provided with a step, the step being configured to support part of the focus ring; and a drive device connected to the moving blocks to activate the moving blocks to drive the focus ring to move up and down. With the bottom electrode assembly, replacement of the focus ring can be performed without opening the process chamber.
    Type: Grant
    Filed: November 8, 2021
    Date of Patent: September 17, 2024
    Assignee: ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
    Inventors: Jiangtao Pei, Zengdi Lian, Rason Zuo, Dee Wu
  • BOTTOM ELECTRODE ASSEMBLY, PLASMA PROCESSING APPARATUS, AND METHOD OF REPLACING FOCUS RING
    Publication number: 20220165551
    Abstract: Disclosed are a bottom electrode assembly, a plasma processing apparatus, and a method of replacing a focus ring, wherein the bottom electrode assembly comprises: a base for supporting a wafer to be processed; a focus ring provided surrounding the outer periphery of the base; a cover ring disposed beneath the focus ring, a plurality of recesses being arranged along the circumferential direction of the cover ring; moving blocks provided in the recesses, an inner top corner of each moving block being provided with a step, the step being configured to support part of the focus ring; and a drive device connected to the moving blocks to activate the moving blocks to drive the focus ring to move up and down. With the bottom electrode assembly, replacement of the focus ring can be performed without opening the process chamber.
    Type: Application
    Filed: November 8, 2021
    Publication date: May 26, 2022
    Inventors: Jiangtao PEI, Zengdi LIAN, Rason ZUO, Dee WU