Patents by Inventor Jianhua Ju
Jianhua Ju has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10630477Abstract: Threshold distributed elliptic curve key generation and signature system and method are disclosed where nodes can generate their own key pairs without the participation of a trust center, each node can process its own key pair according to a secret sharing protocol, complete conversion of the (n, n) threshold to the (t, n) threshold, after determining t signature node, generates a (t, t) threshold private key according to a threshold logic, complete mapping of ptki to ptki?, and according to a signature logic, use ptki? to complete the communication and calculation in the signature protocol, store the relevant calculation results, and complete an overall signature.Type: GrantFiled: July 26, 2019Date of Patent: April 21, 2020Assignee: Blue HelixInventors: Jianhua Ju, Kai Wen, Kailiang Jiang, Yuqi Lin
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Publication number: 20200027966Abstract: A semiconductor device and its manufacturing method are presented. The manufacturing method includes providing a semiconductor structure comprising a substrate, at least one source region on the substrate, an interlayer dielectric layer covering a portion of the source region and having a cavity on the source region, and a pseudo gate insulation layer at the bottom of the cavity covering a portion of the source region; forming a barrier layer in the cavity; forming a loss reduction region in the interlayer dielectric layer by conducting an ion implantation process comprising silicon ion or carbon ion; removing the barrier layer; removing the pseudo gate insulation layer to expose a portion of the source region; and forming a gate structure on the exposed portion of the source region. This inventive concept reduces the loss of the interlayer dielectric layer, thus reduces the height loss of the gate electrode.Type: ApplicationFiled: September 26, 2019Publication date: January 23, 2020Inventors: Zhaoxu SHEN, Jianhua JU, Shaofeng YU, Yang LIU, YongMeng LEE
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Patent number: 10535750Abstract: A semiconductor device and its manufacturing method are presented. The manufacturing method includes providing a semiconductor structure comprising a substrate, at least one source region on the substrate, an interlayer dielectric layer covering a portion of the source region and having a cavity on the source region, and a pseudo gate insulation layer at the bottom of the cavity covering a portion of the source region; forming a barrier layer in the cavity; forming a loss reduction region in the interlayer dielectric layer by conducting an ion implantation process comprising silicon ion or carbon ion; removing the barrier layer; removing the pseudo gate insulation layer to expose a portion of the source region; and forming a gate structure on the exposed portion of the source region. This inventive concept reduces the loss of the interlayer dielectric layer, thus reduces the height loss of the gate electrode.Type: GrantFiled: November 28, 2017Date of Patent: January 14, 2020Assignees: Semiconductor Manufacturing International (Beijing) Corporation, Semiconductor Manufacturing International (Shanghai) CorporationInventors: Zhaoxu Shen, Jianhua Ju, Shaofeng Yu, Yang Liu, YongMeng Lee
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Patent number: 10521861Abstract: The present disclosure provides a method and system for decentralized digital asset storage and transfer. An exemplary system includes a platform including at least three dedicated and computationally independent computing nodes, and a first access gateway communicably coupled to the platform. The platform is configured to, upon receipt of a digital asset storage or transfer instruction via said first access gateway, perform a method including: performing, by each said node independently, a verification process in respect of said instruction to determine a verification result, and broadcasting said verification result thereof to the other nodes; determining a consensus between verification results determined by said nodes; and in the event of a consensus, each node processing said instruction, independently of said other nodes.Type: GrantFiled: July 26, 2019Date of Patent: December 31, 2019Assignee: Blue HelixInventors: Jianhua Ju, Boli Wang, Fulin Tang, Yuqi Lin
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Patent number: 10427185Abstract: A patterning apparatus is provided. The patterning apparatus includes a plurality of liquid jet units arranged in one or more groups and configured to jet an anti-etching liquid onto a surface of a substrate. The patterning apparatus also includes a plurality of exposure units configured to expose light on the anti-etching liquid jetted on the surface of the substrate to heat and cure the jetted anti-etching liquid to form anti-etching patterns on the surface of the substrate. Further, the patterning apparatus includes a control unit configured to control motion status and jetting status of the plurality of liquid jet units and motion status and exposure status of the plurality of exposure units, so as to form the anti-etching patterns at a predetermined line width and thickness.Type: GrantFiled: December 7, 2016Date of Patent: October 1, 2019Assignee: Semiconductor Manufacturing International (Shanghai) CorporationInventors: Qiang Wu, Huayong Hu, Chang Liu, Jianhua Ju, Charles Kwok Fung Lee
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Patent number: 10056301Abstract: A method for forming a transistor is provided. The method includes providing a semiconductor substrate, and forming a dielectric layer on the semiconductor substrate. The dielectric layer has a gate structure recess. The method also includes forming a work function layer on a bottom and sidewalls of the gate structure recess; performing an ion implantation on the work function layer; and forming a gate layer on the work function layer after the ion implantation.Type: GrantFiled: June 20, 2016Date of Patent: August 21, 2018Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATIONInventors: Fei Zhou, Yong Li, Jianhua Ju
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Publication number: 20180151696Abstract: A semiconductor device and its manufacturing method are presented. The manufacturing method includes providing a semiconductor structure comprising a substrate, at least one source region on the substrate, an interlayer dielectric layer covering a portion of the source region and having a cavity on the source region, and a pseudo gate insulation layer at the bottom of the cavity covering a portion of the source region; forming a barrier layer in the cavity; forming a loss reduction region in the interlayer dielectric layer by conducting an ion implantation process comprising silicon ion or carbon ion; removing the barrier layer; removing the pseudo gate insulation layer to expose a portion of the source region; and forming a gate structure on the exposed portion of the source region. This inventive concept reduces the loss of the interlayer dielectric layer, thus reduces the height loss of the gate electrode.Type: ApplicationFiled: November 28, 2017Publication date: May 31, 2018Inventors: Zhaoxu SHEN, Jianhua JU, Shaofeng YU, Yang LIU, YongMeng LEE
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Patent number: 9853030Abstract: Various embodiments provide semiconductor devices and methods for forming the same. A first fin and a second fin are formed on a semiconductor substrate. A first dielectric layer is formed on the semiconductor substrate and has a top surface lower than a top surface of both of the first fin and the second fin. A gate structure is formed on the first dielectric layer and covering across a first portion of each of the first fin and the second fin. A second portion of the first fin on both sides of the gate structure is removed, forming a first recess. A first semiconductor layer is formed in the first recess. A second dielectric layer is formed on the first dielectric layer and the first semiconductor layer, and exposes a top surface of the second fin. A second semiconductor layer is formed on the exposed top surface of the second fin.Type: GrantFiled: May 5, 2016Date of Patent: December 26, 2017Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATIONInventors: Mieno Fumitake, Jianhua Ju
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Publication number: 20170365527Abstract: A method for forming a transistor is provided. The method includes providing a semiconductor substrate, and forming a dielectric layer on the semiconductor substrate. The dielectric layer has a gate structure recess. The method also includes forming a work function layer on a bottom and sidewalls of the gate structure recess; performing an ion implantation on the work function layer; and forming a gate layer on the work function layer after the ion implantation.Type: ApplicationFiled: June 20, 2016Publication date: December 21, 2017Inventors: FEI ZHOU, YONG LI, JIANHUA JU
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Patent number: 9607995Abstract: A method for forming a semiconductor having a plurality of FinFETs. The method includes providing a semiconductor substrate having a surface; and forming a plurality of first fins and a plurality of second fins on the surface of the semiconductor substrate. Further, the method also includes forming a mask layer on top surfaces of the plurality of first fins and the plurality of second fins; and forming an insulation material layer covering side surfaces of the first fins, the second fins and the mask layer. Further, the method includes removing a portion of the mask layer on the first fins; and forming a continuous first gate structure covering side and top surfaces of a plurality of first fins and a discontinuous second gate structure covering only the side surfaces of the second fins and the side surfaces of the mask layer.Type: GrantFiled: January 4, 2016Date of Patent: March 28, 2017Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATIONInventors: Jianhua Ju, Shaofeng Yu
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Publication number: 20170080456Abstract: A patterning apparatus is provided. The patterning apparatus includes a plurality of liquid jet units arranged in one or more groups and configured to jet an anti-etching liquid onto a surface of a substrate. The patterning apparatus also includes a plurality of exposure units configured to expose light on the anti-etching liquid jetted on the surface of the substrate to heat and cure the jetted anti-etching liquid to form anti-etching patterns on the surface of the substrate. Further, the patterning apparatus includes a control unit configured to control motion status and jetting status of the plurality of liquid jet units and motion status and exposure status of the plurality of exposure units, so as to form the anti-etching patterns at a predetermined line width and thickness.Type: ApplicationFiled: December 7, 2016Publication date: March 23, 2017Inventors: QIANG WU, HUAYONG HU, CHANG LIU, JIANHUA JU, CHARLES KWOK FUNG LEE
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Patent number: 9547236Abstract: A patterning apparatus is provided. The patterning apparatus includes a plurality of liquid jet units arranged in one or more groups and configured to jet an anti-etching liquid onto a surface of a substrate. The patterning apparatus also includes a plurality of exposure units configured to expose light on the anti-etching liquid jetted on the surface of the substrate to heat and cure the jetted anti-etching liquid to form anti-etching patterns on the surface of the substrate. Further, the patterning apparatus includes a control unit configured to control motion status and jetting status of the plurality of liquid jet units and motion status and exposure status of the plurality of exposure units, so as to form the anti-etching patterns at a predetermined line width and thickness.Type: GrantFiled: December 12, 2014Date of Patent: January 17, 2017Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATIONInventors: Qiang Wu, Huayong Hu, Chang Liu, Jianhua Ju, Charles Kwok Fung Lee
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Patent number: 9514994Abstract: A method for forming a FinFET device is provided. The method includes providing a substrate having a first region and a second region; and forming a plurality of fins on the substrate. The method also includes forming a plurality of doping regions with different doping concentrations in the fins in the first region; and forming a plurality of dummy gate structures over the plurality of fins. Further, the method includes forming source and drain regions in the plurality of fins at both sides of the dummy gate structures; and removing the dummy gate structures to form a plurality of openings to expose the plurality of fins. Further, the method also includes forming a plurality of work function layers with different work functions on the exposed fins in the openings in the second region; and forming gate structures in the openings.Type: GrantFiled: January 4, 2016Date of Patent: December 6, 2016Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATIONInventor: Jianhua Ju
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Patent number: 9455255Abstract: A method of manufacturing a fin-type field effect transistor includes sequentially forming a first mask and a second mask on a semiconductor substrate; patterning the second mask; forming and patterning a third mask on the second mask in accordance with a fin pattern of the fin-type field effect transistor; etching the semiconductor substrate, the first mask, and the second mask through the third mask, wherein portions of the first and second masks are removed and a first trench is formed in the semiconductor substrate; removing the third mask; etching the first mask through the second mask and removing the second mask; etching the semiconductor substrate through the first mask to form a plurality of fins and a second trench disposed between adjacent fins, wherein etching the semiconductor substrate further deepens the first trench such that a depth of the first trench is greater than a depth of the second trench.Type: GrantFiled: March 31, 2015Date of Patent: September 27, 2016Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATIONInventors: JianHua Ju, Shuai Zhang, Shaofeng Yu
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Publication number: 20160247807Abstract: Various embodiments provide semiconductor devices and methods for forming the same. A first fin and a second fin are formed on a semiconductor substrate. A first dielectric layer is formed on the semiconductor substrate and has a top surface lower than a top surface of both of the first fin and the second fin. A gate structure is formed on the first dielectric layer and covering across a first portion of each of the first fin and the second fin. A second portion of the first fin on both sides of the gate structure is removed, forming a first recess. A first semiconductor layer is formed in the first recess. A second dielectric layer is formed on the first dielectric layer and the first semiconductor layer, and exposes a top surface of the second fin. A second semiconductor layer is formed on the exposed top surface of the second fin.Type: ApplicationFiled: May 5, 2016Publication date: August 25, 2016Inventors: MIENO FUMITAKE, JIANHUA JU
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Publication number: 20160197017Abstract: A method for forming a FinFET device is provided. The method includes providing a substrate having a first region and a second region; and forming a plurality of fins on the substrate. The method also includes forming a plurality of doping regions with different doping concentrations in the fins in the first region; and forming a plurality of dummy gate structures over the plurality of fins. Further, the method includes forming source and drain regions in the plurality of fins at both sides of the dummy gate structures; and removing the dummy gate structures to form a plurality of openings to expose the plurality of fins. Further, the method also includes forming a plurality of work function layers with different work functions on the exposed fins in the openings in the second region; and forming gate structures in the openings.Type: ApplicationFiled: January 4, 2016Publication date: July 7, 2016Inventor: JIANHUA JU
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Publication number: 20160197085Abstract: A method for forming a semiconductor having a plurality of FinFETs. The method includes providing a semiconductor substrate having a surface; and forming a plurality of first fins and a plurality of second fins on the surface of the semiconductor substrate. Further, the method also includes forming a mask layer on top surfaces of the plurality of first fins and the plurality of second fins; and forming an insulation material layer covering side surfaces of the first fins, the second fins and the mask layer. Further, the method includes removing a portion of the mask layer on the first fins; and forming a continuous first gate structure covering side and top surfaces of a plurality of first fins and a discontinuous second gate structure covering only the side surfaces of the second fins and the side surfaces of the mask layer.Type: ApplicationFiled: January 4, 2016Publication date: July 7, 2016Inventors: Jianhua Ju, Shaofeng Yu
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Patent number: 9362286Abstract: Various embodiments provide semiconductor devices and methods for forming the same. A first fin and a second fin are formed on a semiconductor substrate. A first dielectric layer is formed on the semiconductor substrate and has a top surface lower than a top surface of both of the first fin and the second fin. A gate structure is formed on the first dielectric layer and covering across a first portion of each of the first fin and the second fin. A second portion of the first fin on both sides of the gate structure is removed, forming a first recess. A first semiconductor layer is formed in the first recess. A second dielectric layer is formed on the first dielectric layer and the first semiconductor layer, and exposes a top surface of the second fin. A second semiconductor layer is formed on the exposed top surface of the second fin.Type: GrantFiled: December 18, 2014Date of Patent: June 7, 2016Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATIONInventors: Mieno Fumitake, Jianhua Ju
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Patent number: 9331084Abstract: A method of manufacturing a semiconductor device is provided. The method includes forming a fin structure on a semiconductor substrate and forming a well region in the semiconductor substrate by ion implantation so as to form transistors. The transistors include a pull-up transistor, a transfer gate transistor, and a pull-down transistor of a SRAM cell. The ion implantation is used to adjust threshold voltages of the transistors. Standard threshold voltage (SVt) ion implantation conditions are used to adjust a threshold voltage of the pull-up transistor and a threshold voltage of the transfer gate transistor, and low threshold voltage (LVt) ion implantation conditions are used to adjust a threshold voltage of the pull-down transistor.Type: GrantFiled: January 7, 2015Date of Patent: May 3, 2016Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATIONInventors: Jianhua Ju, Shuai Zhang
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Patent number: 9322040Abstract: The invention discloses a Pseudonocardia sp. and a method for preparing Deoxynyboquinone by utilizing the same. Pseudonocardia sp. SCSIO 01299 was collected in China Center for Type Culture Collection (CCTCC) (Address: Wuhan University, Wuhan City, China) with the collection number of CCTCC NO: M 2011255 on Jul. 18, 2011. The Pseudonocardia sp. SCSIO 01299 can produce antibiotic Deoxynyboquinone, so that the Pseudonocardia sp. SCSIO 01299 can be utilized for preparing Deoxynyboquinone and a new way is provided for producing antibiotic Deoxynyboquinone with anti-tumor activity.Type: GrantFiled: September 1, 2011Date of Patent: April 26, 2016Assignee: SOUTH CHINA SEA INSTITUTE OF OCEANOLOGY, CHINESE ACADEMY OF SCIENCESInventors: Si Zhang, Changsheng Zhang, Xinpeng Tian, Sumei Li, Wenjun Zhang, Haibo Zhang, Guangtao Zhang, Hao Yin, Jianhua Ju