Patents by Inventor Jianmin Ji

Jianmin Ji has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Workpiece processing apparatus with plasma and thermal processing systems
    Patent number: 11955315
    Abstract: A processing apparatus for processing a workpiece is presented. The processing apparatus includes a processing chamber, a plasma chamber separated from the processing chamber disposed on a first side of the processing chamber, and a plasma source configured to generate a plasma in the plasma chamber. One or more radiative heat sources configured to heat the workpiece disposed on a second and opposite side of the first side of the processing chamber. A dielectric window is disposed between the workpiece support and the one or more heat sources. The processing apparatus includes a rotation system configured to rotate the workpiece, the rotation system comprising a magnetic actuator.
    Type: Grant
    Filed: April 23, 2021
    Date of Patent: April 9, 2024
    Assignees: Beijing E-Town Semiconductor Technology Co., Ltd., Mattson Technology, Inc.
    Inventors: Dieter Hezler, Keli Huang, Jianmin Ji, Deqiang Zeng, Manuel Sohn
  • Workpiece Processing Apparatus with Plasma and Thermal Processing Systems
    Publication number: 20220189737
    Abstract: A processing apparatus for processing a workpiece is presented. The processing apparatus includes a processing chamber, a plasma chamber separated from the processing chamber disposed on a first side of the processing chamber, and a plasma source configured to generate a plasma in the plasma chamber. One or more radiative heat sources configured to heat the workpiece disposed on a second and opposite side of the first side of the processing chamber. A dielectric window is disposed between the workpiece support and the one or more heat sources. The processing apparatus includes a rotation system configured to rotate the workpiece, the rotation system comprising a magnetic actuator.
    Type: Application
    Filed: April 23, 2021
    Publication date: June 16, 2022
    Inventors: Dieter Hezler, Keli Huang, Jianmin Ji, Deqiang Zeng, Manuel Sohn