Patents by Inventor Jianming Fu

Jianming Fu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240170254
    Abstract: Embodiments of the disclosure are directed to PEALD batch processing chambers. Some embodiments are directed to processing chambers having one or more inductively coupled plasma (ICP) coils electrically connected to at least one RF power source. Some embodiments are directed to processing chambers having a wafer cassette comprising a plurality of platforms, each platform configured to support at least one wafer for processing, and one or more RF power sources electrically connected to the plurality of platforms in the wafer cassette. In some embodiments, the plurality of platforms have a first set of electrodes having a first polarity and a second set of electrodes having a second polarity, and one or more RF power sources electrically connected to the plurality of platforms in the wafer cassette.
    Type: Application
    Filed: November 21, 2022
    Publication date: May 23, 2024
    Applicant: Applied Materials, Inc.
    Inventors: Jianming Fu, Tza-Jing Gung, Sanjeev Baluja, Haitao Wang, Mandyam Sriram, Srinivas Gandikota, Steven V. Sansoni
  • Patent number: 11897524
    Abstract: This application relates to an overload and unbalanced load detecting system for a railway and a detecting method. This system includes at least one steel rail. A rail web of each steel rail is provided with two sampling points at two sides between every two adjacent rail sleepers, respectively, and the two sampling points on one side are symmetrically disposed about the steel rail with respect to the two sampling points on the other side. A fiber-optic sensitive element used for continuously measuring a load when a train passes through the two sampling points is obliquely fixed at each sampling point, and two fiber-optic sensitive elements on the same side of each steel rail are disposed at an angle of 90° with each other.
    Type: Grant
    Filed: July 9, 2020
    Date of Patent: February 13, 2024
    Assignee: BEIJING ORIENTAL RAILWAY TECHNOLOGY DEVELOPMENT CO., LTD.
    Inventors: Xiaobing Liu, Xiangsheng Pang, Zhiqiang Wang, Jianming Fu, Chao Guo
  • Patent number: 11117262
    Abstract: One embodiment can provide an intelligent robotic system. The intelligent robotic system can include at least one multi-axis robotic arm, at least one gripper attached to the multi-axis robotic arm for picking up a component, a machine vision system comprising at least a three-dimensional (3D) surfacing-imaging module for detecting 3D pose information associated with the component, and a control module configured to control movements of the multi-axis robotic arm and the gripper based on the detected 3D pose of the component.
    Type: Grant
    Filed: July 31, 2018
    Date of Patent: September 14, 2021
    Assignee: EBOTS INC.
    Inventors: Kai C. Yung, Zheng Xu, Jianming Fu
  • Publication number: 20200339167
    Abstract: This application relates to an overload and unbalanced load detecting system for a railway and a detecting method. This system includes at least one steel rail. A rail web of each steel rail is provided with two sampling points at two sides between every two adjacent rail sleepers, respectively, and the two sampling points on one side are symmetrically disposed about the steel rail with respect to the two sampling points on the other side. A fiber-optic sensitive element used for continuously measuring a load when a train passes through the two sampling points is obliquely fixed at each sampling point, and two fiber-optic sensitive elements on the same side of each steel rail are disposed at an angle of 90° with each other.
    Type: Application
    Filed: July 9, 2020
    Publication date: October 29, 2020
    Applicant: BEIJING ORIENTAL RAILWAY TECHNOLOGY DEVELOPMENT CO., LTD.
    Inventors: Xiaobing LIU, Xiangsheng PANG, Zhiqiang WANG, Jianming FU, Chao GUO
  • Publication number: 20190184570
    Abstract: One embodiment can provide an intelligent robotic system. The intelligent robotic system can include at least one multi-axis robotic arm, at least one gripper attached to the multi-axis robotic arm for picking up a component, a machine vision system comprising at least a three-dimensional (3D) surfacing-imaging module for detecting 3D pose information associated with the component, and a control module configured to control movements of the multi-axis robotic arm and the gripper based on the detected 3D pose of the component.
    Type: Application
    Filed: July 31, 2018
    Publication date: June 20, 2019
    Applicant: Enova Technology, Inc.
    Inventors: Kai C. Yung, Zheng Xu, Jianming Fu
  • Patent number: 10309012
    Abstract: A wafer carrier for carrying solar cell wafers during a deposition process is described. The carrier is coated with pyrolytic carbon, silicon carbide, or a ceramic material, and is adapted to receive and support the wafers.
    Type: Grant
    Filed: May 14, 2015
    Date of Patent: June 4, 2019
    Assignee: Tesla, Inc.
    Inventors: Yongkee Chae, Jiunn Benjamin Heng, Jianming Fu, Zheng Xu
  • Patent number: 10164127
    Abstract: One embodiment of the present invention provides a solar module. The solar module includes a front-side cover, a back-side cover, and a plurality of solar cells situated between the front- and back-side covers. A respective solar cell includes a multi-layer semiconductor structure, a front-side electrode situated above the multi-layer semiconductor structure, and a back-side electrode situated below the multi-layer semiconductor structure. Each of the front-side and the back-side electrodes comprises a metal grid. A respective metal grid comprises a plurality of finger lines and a single busbar coupled to the finger lines. The single busbar is configured to collect current from the finger lines.
    Type: Grant
    Filed: November 8, 2016
    Date of Patent: December 25, 2018
    Assignee: Tesla, Inc.
    Inventors: Jiunn Benjamin Heng, Jianming Fu, Zheng Xu, Bobby Yang
  • Publication number: 20180327893
    Abstract: A magnetron sputter reactor for sputtering deposition materials such as tantalum, tantalum nitride and copper, for example and its method of use, in which self-ionized plasma (SIP) sputtering and inductively coupled plasma (ICP) sputtering are promoted, either together or alternately, in the same or different chambers. Also, bottom coverage may be thinned or eliminated by ICP resputtering in one chamber and SIP in another. SIP is promoted by a small magnetron having poles of unequal magnetic strength and a high power applied to the target during sputtering. ICP is provided by one or more RF coils which inductively couple RF energy into a plasma. The combined SIP-ICP layers can act as a liner or barrier or seed or nucleation layer for hole. In addition, an RF coil may be sputtered to provide protective material during ICP resputtering. In another chamber an array of auxiliary magnets positioned along sidewalls of a magnetron sputter reactor on a side towards the wafer from the target.
    Type: Application
    Filed: July 11, 2018
    Publication date: November 15, 2018
    Inventors: Peijun DING, Rong TAO, Zheng XU, Daniel C. LUBBEN, Suraj RENGARAJAN, Michael A. MILLER, Arvind SUNDARRAJAN, Xianmin TANG, John C. FORSTER, Jianming FU, Roderick C. MOSELY, Fusen CHEN, Praburam GOPALRAJA
  • Patent number: 10115839
    Abstract: One embodiment of the present invention provides a solar module. The solar module includes a front-side cover, a back-side cover, and a plurality of solar cells situated between the front- and back-side covers. A respective solar cell includes a multi-layer semiconductor structure, a front-side electrode situated above the multi-layer semiconductor structure, and a back-side electrode situated below the multi-layer semiconductor structure. Each of the front-side and the back-side electrodes comprises a metal grid. A respective metal grid comprises a plurality of finger lines and a single busbar coupled to the finger lines. The single busbar is configured to collect current from the finger lines.
    Type: Grant
    Filed: July 27, 2016
    Date of Patent: October 30, 2018
    Assignee: Tesla, Inc.
    Inventors: Jiunn Benjamin Heng, Jianming Fu, Zheng Xu, Bobby Yang
  • Patent number: 10084107
    Abstract: One embodiment of the present invention provides a solar cell. The solar cell includes a Si base layer, a passivation layer situated above the Si base layer, a layer of heavily doped amorphous Si (a-Si) situated above the passivation layer, a first transparent-conducting-oxide (TCO) layer situated above the heavily doped a-Si layer, a back-side electrode situated below the Si base layer, and a front-side electrode situated above the first TCO layer. The first TCO layer comprises at least one of: GaInO, GaInSnO, ZnInO, and ZnInSnO.
    Type: Grant
    Filed: November 30, 2015
    Date of Patent: September 25, 2018
    Assignee: Tesla, Inc.
    Inventors: Jianming Fu, Zheng Xu, Jiunn Benjamin Heng, Chentao Yu
  • Patent number: 10084099
    Abstract: One embodiment of the present invention provides a solar cell. The solar cell includes a substrate, a first heavily doped crystalline-Si (c-Si) layer situated above the substrate, a lightly doped c-Si layer situated above the first heavily doped crystalline-Si layer, a second heavily doped c-Si layer situated above the lightly doped c-Si layer, a front side electrode grid situated above the second heavily doped c-Si layer, and a backside electrode grid situated on the backside of the substrate.
    Type: Grant
    Filed: April 20, 2015
    Date of Patent: September 25, 2018
    Assignee: Tesla, Inc.
    Inventors: Chentao Yu, Zheng Xu, Jiunn Benjamin Heng, Jianming Fu
  • Patent number: 10047430
    Abstract: A magnetron sputter reactor for sputtering deposition materials such as tantalum, tantalum nitride and copper, for example, and its method of use, in which self-ionized plasma (SIP) sputtering and inductively coupled plasma (ICP) sputtering are promoted, either together or alternately, in the same or different chambers. Also, bottom coverage may be thinned or eliminated by ICP resputtering in one chamber and SIP in another. SIP is promoted by a small magnetron having poles of unequal magnetic strength and a high power applied to the target during sputtering. ICP is provided by one or more RF coils which inductively couple RF energy into a plasma. The combined SIP-ICP layers can act as a liner or barrier or seed or nucleation layer for hole. In addition, an RF coil may be sputtered to provide protective material during ICP resputtering. In another chamber an array of auxiliary magnets positioned along sidewalls of a magnetron sputter reactor on a side towards the wafer from the target.
    Type: Grant
    Filed: March 11, 2014
    Date of Patent: August 14, 2018
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Peijun Ding, Rong Tao, Zheng Xu, Daniel C. Lubben, Suraj Rengarajan, Michael A. Miller, Arvind Sundarrajan, Xianmin Tang, John C. Forster, Jianming Fu, Roderick C. Mosely, Fusen Chen, Praburam Gopalraja
  • Patent number: 9972740
    Abstract: One embodiment of the present invention can provide a system for fabricating a photovoltaic structure. During fabrication, the system can deposit a first passivation layer on a first side of a Si base layer of the photovoltaic structure using a static chemical vapor deposition process. The static chemical vapor deposition process can be performed inside a first reaction chamber. The system can then transfer the photovoltaic structure from the first reaction chamber to a second reaction chamber without the photovoltaic structure leaving a common vacuum space comprising both reaction chambers, and deposit a second passivation layer on the first passivation layer using an inline chemical vapor deposition process. The inline chemical vapor deposition process can be performed inside the second reaction chamber.
    Type: Grant
    Filed: December 30, 2015
    Date of Patent: May 15, 2018
    Assignee: TESLA, INC.
    Inventors: Yongkee Chae, Jianming Fu
  • Publication number: 20180102452
    Abstract: A system for fabricating a solar string is provided. The system obtains multiple photovoltaic structures. A photovoltaic structure comprises first and second metallic grids on first and second surfaces. The system applies, over the first and second grids, an organic coating, which covers a top surface of a first edge busbar of the first metallic grid and a top surface of a second edge busbar of the second metallic grid. The system removes portions of the organic coating to expose a portion of the top surface of the first edge busbar and a corresponding portion of the top surface of the second edge busbar, deposits conductive paste on the first edge busbar at locations where the organic coating is removed, and cascades the plurality of photovoltaic structures into a string by overlapping the first edge busbar of the photovoltaic structure with the second edge busbar of an adjacent photovoltaic structure.
    Type: Application
    Filed: October 10, 2016
    Publication date: April 12, 2018
    Applicant: SolarCity Corporation
    Inventors: Zhi-Wen Sun, Jianming Fu
  • Patent number: 9887306
    Abstract: One embodiment of the present invention provides a photovoltaic module. The photovoltaic module includes an optical concentrator and a tunneling-junction solar cell. The tunneling-junction solar cell includes a base layer, a quantum-tunneling-barrier (QTB) layer situated above the base layer, an emitter layer, a front-side electrode, and a back-side electrode.
    Type: Grant
    Filed: May 4, 2015
    Date of Patent: February 6, 2018
    Assignee: Tesla, Inc.
    Inventors: Jianming Fu, Zheng Xu, Jiunn Benjamin Heng, Chentao Yu
  • Patent number: 9865754
    Abstract: One embodiment of the present invention provides a solar cell. The solar cell includes a base layer comprising crystalline Si (c-Si), a hole collector situated on a first side of the base layer, and an electron collector situated on a second side of the base layer, which is opposite the first side. The hole collector includes a quantum-tunneling-barrier (QTB) layer situated adjacent to the base layer and a transparent conducting oxide (TCO) layer situated adjacent to the QTB layer. The TCO layer has a work function of at least 5.0 eV.
    Type: Grant
    Filed: October 10, 2013
    Date of Patent: January 9, 2018
    Assignee: TESLA, INC.
    Inventors: Zhigang Xie, Jiunn Benjamin Heng, Wei Wang, Jianming Fu, Zheng Xu
  • Patent number: 9800053
    Abstract: One embodiment of the present invention provides a solar cell panel that includes a front-side cover, a back-side cover, a number of solar cells situated between the front-side cover and the back-side cover, and a number of maximum power point tracking (MPPT) devices situated between the front-side cover and the back-side cover.
    Type: Grant
    Filed: October 4, 2011
    Date of Patent: October 24, 2017
    Assignee: Tesla, Inc.
    Inventors: Christopher James Beitel, Jiunn Benjamin Heng, Jianming Fu, Zheng Xu
  • Patent number: 9773928
    Abstract: One embodiment of the present invention provides a method for fabricating solar cells. During operation, an anti-reflection layer is deposited on top of a semiconductor structure to form a photovoltaic structure, and a front-side electrode grid comprising a metal stack is formed on top of the photovoltaic structure. The metal stack comprises a metal-adhesive layer comprising Ti or Ta, and a conducting layer comprising Cu or Ag situated above the metal-adhesive layer.
    Type: Grant
    Filed: August 29, 2011
    Date of Patent: September 26, 2017
    Assignee: TESLA, INC.
    Inventors: Jianming Fu, Zheng Xu, Chentao Yu, Jiunn Benjamin Heng
  • Publication number: 20170162722
    Abstract: A method of fabricating a solar cell is described. The solar cell can include a photovoltaic structure and a metallic grid on the photovoltaic structure. The metallic grid can include one or more electroplated metal layers, a busbar, and a plurality of finger lines connected to the busbar, where one or more finger lines have variable widths.
    Type: Application
    Filed: December 8, 2015
    Publication date: June 8, 2017
    Applicant: SolarCity Corporation
    Inventors: Jianming Fu, Jiunn Benjamin Heng, Chunguang Xiao, Yunlai Yuan
  • Publication number: 20170148943
    Abstract: One embodiment of the present invention provides a double-sided heterojunction solar cell module. The solar cell includes a frontside glass cover, a backside glass cover situated below the frontside glass cover, and a number of solar cells situated between the frontside glass cover and the backside glass cover. Each solar cell includes a semiconductor multilayer structure situated below the frontside glass cover, including: a frontside electrode grid, a first layer of heavily doped amorphous Si (a-Si) situated below the frontside electrode, a layer of lightly doped crystalline-Si (c-Si) situated below the first layer of heavily doped a-Si, and a layer of heavily doped c-Si situated below the lightly doped c-Si layer. The solar cell also includes a second layer of heavily doped a-Si situated below the multilayer structure; and a backside electrode situated below the second layer of heavily doped a-Si.
    Type: Application
    Filed: December 1, 2016
    Publication date: May 25, 2017
    Applicant: SolarCity Corporation
    Inventors: Jiunn Benjamin Heng, Chentao Yu, Zheng Xu, Jianming Fu, Peijun Ding