Patents by Inventor Jiann-Cherng Chen

Jiann-Cherng Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6997664
    Abstract: The present invention proposes an apparatus for loading and unloading wafers to and from the semiconductor fabrication equipment. The present invention uses two U-shaped port plate supporters of high rigidity to respectively join with drive devices such as lead screws, shaft bearings, and a lead device, and then join with components such as a port plate, a port door, and a base. The assembly is driven by a motor via timing pulleys, timing belts, idle wheels, a pair of lead screws, shaft bearings, and a lead device. An encoder is matched for feedback control. Thereby, accurate positioning of the main mechanism of the wafer pod responsible for upward and downward movement can be achieved so as to increase the accuracy and reliability of positioning transfer of wafers. Secondarily, the contamination of particles resulted from the motion of the main mechanism can be reduced by using an intake filtering system.
    Type: Grant
    Filed: July 19, 2000
    Date of Patent: February 14, 2006
    Assignee: Industrial Technology Research Institute
    Inventors: Muh-Wang Liang, Chun-Kai Huang, Jiann-Cherng Chen, Tzong-Ming Wu, Ping-Yu Hu, Kuan-Chou Chen
  • Patent number: 6352005
    Abstract: A two screw double-stroke and screw differential-motion mechanism is applied in a standard mechanical interface. The two mechanisms are utilized for the correlation of transmission between screws and nuts and the screw differential-motion, so as to achieve more efficient positioning and clamp retrieval and placement.
    Type: Grant
    Filed: April 6, 2000
    Date of Patent: March 5, 2002
    Assignee: Industrial Technology Reseach Institute
    Inventors: Wu-Lang Lin, Kuei-Jung Chen, Tzong-Ming Wu, Jiann-Cherng Chen