Abstract: In some embodiments, a sonic cleaning system includes a tank configured to receive a liquid that enables propagation of sonic waves and a cylindrical insert located within the tank. The cylindrical insert includes a first end having a first opening and a second end opposite the first end. The second end has a second opening. The cylindrical insert is configured to suspend a workpiece between the first opening and the second opening. The sonic cleaning system includes a sonic transducer located within the cylindrical insert.

Abstract: A non-contact method for detecting and distinguishing a human and an animal based on IR-UWB bio-radar signals includes: step 1, transmitting a radar pulse to a target by a transmitting antenna of an IR-UWB bio-radar; and obtaining, by a receiving antenna of the IR-UWB bio-radar, a radar echo signal E(n,m) generated from the radar pulse reflected on the target; step 2: performing signal preprocessing on the radar echo signal E(n,m) obtained in step 1, to obtain a first energy signal E6(l); step 3: removing a direct wave from E6(l) obtained in step 2 to obtain a second energy signal E7(l), and obtaining a maximum amplitude E7max of E7(l) and a position lmax corresponding to the maximum amplitude in a slow time direction; step 4: calculating a peak-to-background ratio VEtoB of E7(l), calculating an average correlation coefficient rm, and determining a type of the target through a target detection and distinction rule.

Abstract: Provided is a multi-target life detection method based on radar signals. The method includes: performing time accumulation in a slow time direction on a preprocessed echo signal to obtain a first echo signal; performing an envelope extraction of inflection points on the first echo signal to obtain a second echo signal; calculating an average value of all amplitude signals in the second echo signal other than M marked amplitude signals; and in response to a ratio of a marked amplitude signal to the average value being greater than a threshold, determining that a living target exists at a radar detection distance corresponding to the marked amplitude signal. According to the life detection method of the present disclosure, a normalization method is adopted to normalize signal amplitudes of the radar in a dimension of fast time (distance). In addition, two envelope extractions of inflection points may be performed.

Abstract: A non-contact method for detecting and distinguishing a human and an animal based on IR-UWB bio-radar signals includes: step 1, transmitting a radar pulse to a target by a transmitting antenna of an IR-UWB bio-radar; and obtaining, by a receiving antenna of the IR-UWB bio-radar, a radar echo signal E(n,m) generated from the radar pulse reflected on the target; step 2: performing signal preprocessing on the radar echo signal E(n,m) obtained in step 1, to obtain a first energy signal E6(l); step 3: removing a direct wave from E6(l) obtained in step 2 to obtain a second energy signal E7(l), and obtaining a maximum amplitude E7max of E7(l) and a position lmax corresponding to the maximum amplitude in a slow time direction; step 4: calculating a peak-to-background ratio VEtoB of E7(l), calculating an average correlation coefficient rm, and determining a type of the target through a target detection and distinction rule.

Abstract: Implementations described herein generally relate to substrate processing equipment and more particularly to methods and compositions for temperature control of substrate processing equipment. In one implementation, a method of cooling a processing chamber component is provided. The method comprises introducing an inert purge gas into a supply reservoir containing a coolant and flowing the treated coolant to a processing chamber component to cool the processing chamber component. The coolant initially comprises deionized water and a water-soluble base.

Abstract: Embodiments of the disclosure provide a chamber component for use in a plasma processing chamber apparatus. The chamber component may include a coating layer that provides a fluorine-rich surface. In one embodiment, a chamber component, for use in a plasma processing apparatus, includes a body having an outer layer comprising yttria having a coating layer formed thereon, wherein the coating layer comprises a yttrium fluoride containing material.

Abstract: Provided is a multi-target life detection method based on radar signals. The method includes: performing time accumulation in a slow time direction on a preprocessed echo signal to obtain a first echo signal; performing an envelope extraction of inflection points on the first echo signal to obtain a second echo signal; calculating an average value of all amplitude signals in the second echo signal other than M marked amplitude signals; and in response to a ratio of a marked amplitude signal to the average value being greater than a threshold, determining that a living target exists at a radar detection distance corresponding to the marked amplitude signal. According to the life detection method of the present disclosure, a normalization method is adopted to normalize signal amplitudes of the radar in a dimension of fast time (distance). In addition, two envelope extractions of inflection points may be performed.

Abstract: In some embodiments, a sonic cleaning system includes a tank configured to receive a liquid that enables propagation of sonic waves and a cylindrical insert located within the tank. The cylindrical insert includes a first end having a first opening and a second end opposite the first end. The second end has a second opening. The cylindrical insert is configured suspend a workpiece between the first opening and the second opening. The sonic cleaning system includes a sonic transducer located within the cylindrical insert.

Abstract: The implementations described herein generally relate to 30 nm in-line liquid particle count testing equipment which analyses and cleans semiconductor processing equipment. More specifically, the implementations described relate to a system for diluting, analyzing, and modifying fluids to enable the observation of the contents of the fluids. A dilution sampling tool is coupled with a liquid particle detector for reading the contents of an extraction solution containing particles from semiconductor processing equipment, such as a liner, a shield, a faceplate, or a showerhead, in a cleaning tank. As such, accurate liquid particle readings may be had which reduce oversaturation of the particle detector.

Abstract: Embodiments described herein generally relate to an apparatus and methods for reducing the deposition of polymers in a semiconductor processing chamber. A heater jacket and heat sources are provided and may be configured to maintain a uniform temperature profile of the processing chamber. A method of maintaining a uniform temperature profile of a dielectric ceiling of the processing chamber is also provided.

Abstract: Embodiments of the disclosure provide a chamber component for use in a plasma processing chamber apparatus. The chamber component may include a coating layer that provides a fluorine-rich surface. In one embodiment, a chamber component, for use in a plasma processing apparatus, includes a body having an outer layer comprising yttria having a coating layer formed thereon, wherein the coating layer comprises a yttrium fluoride containing material.

Abstract: Implementations of the present disclosure provide a chamber component for use in a processing chamber. The chamber component includes a body for use in a plasma processing chamber, a barrier oxide layer formed on at least a portion of an exposed surface of the body, the barrier oxide layer having a density of about 2 gm/cm3 or greater, and an aluminum oxyfluoride layer formed on the barrier oxide layer, the aluminum oxyfluoride layer having a thickness of about 2 nm or greater.

Abstract: Implementations described herein generally relate to substrate processing equipment and more particularly to methods and compositions for temperature control of substrate processing equipment. In one implementation, a method of cooling a processing chamber component is provided. The method comprises introducing an inert purge gas into a supply reservoir containing a coolant and flowing the treated coolant to a processing chamber component to cool the processing chamber component. The coolant initially comprises deionized water and a water-soluble base.

Abstract: The implementations described herein generally relate to 30 nm in-line liquid particle count testing equipment which analyses and cleans semiconductor processing equipment. More specifically, the implementations described relate to a system for diluting, analyzing, and modifying fluids to enable the observation of the contents of the fluids. A dilution sampling tool is coupled with a liquid particle detector for reading the contents of an extraction solution containing particles from semiconductor processing equipment, such as a liner, a shield, a faceplate, or a showerhead, in a cleaning tank. As such, accurate liquid particle readings may be had which reduce oversaturation of the particle detector.

Abstract: Embodiments of process kit shields and physical vapor deposition (PVD) chambers incorporating same are provided herein. In some embodiments, a process kit shield for use in depositing a first material in a physical vapor deposition process may include an annular body defining an opening surrounded by the body, wherein the annular body is fabricated from the first material, and an etch stop coating formed on opening-facing surfaces of the annular body, the etch stop coating is fabricated from a second material that is different from the first material, the second material having a high etch selectivity with respect to the first material.

Abstract: Embodiment disclosed herein generally relate to a method for removing aluminum fluoride contamination from semiconductor processing equipment. A method for cleaning semiconductor processing equipment is disclosed herein. The method includes maintaining a container of water at a temperature of between 50 degrees Celsius and 100 degrees Celsius and soaking a semiconductor processing equipment having surface contamination comprising aluminum fluoride in the water, wherein the semiconductor processing equipment is comprised of a material having a solubility directly related to the temperature of the water.

Abstract: A multichannel UWB-based radar life detector includes a transmitting antenna and three receiving antennas for forming three radar echo signal channels.

Abstract: A processing chamber component and method for fabricating the same are provided. The processing chamber component is fabricated in the manner described herein and includes the creation of at least a macro texture on a surface of the chamber component. The macro texture is defined by a plurality of engineered features arranged in a predefined orientation on the surface of the chamber component. In some embodiments, the engineered features prevent formation of a line of sight surface defined between the features to enhance retention of films deposited on the chamber component.

Abstract: A processing chamber component and method for fabricating the same are provided. The processing chamber component is fabricated in the manner described herein and includes the creation of at least a macro texture on a surface of the chamber component. The macro texture is defined by a plurality of engineered features arranged in a predefined orientation on the surface of the chamber component. In some embodiments, the engineered features prevent formation of a line of sight surface defined between the features to enhance retention of films deposited on the chamber component.

Abstract: A multichannel UWB-based radar life detector includes a transmitting antenna and three receiving antennas for forming three radar echo signal channels.