Abstract: Disclosed are a substrate carrying manipulator and a substrate carrying device. The substrate carrying manipulator includes: a bearing frame, having a bearing surface; grabbing assemblies installed on the bearing frame and configured to cooperate with a non-display region of a substrate; and anti-contact assemblies configured to at least provide a gas repulsive force in a direction from the bearing surface to the substrate for a display region of the substrate.

Abstract: The present invention provides a method and apparatus for analyzing a semiconductor wafer for analyzing a defect distribution pattern on a semiconductor wafer to be tested. The method comprises: obtaining a defect distribution map of the semiconductor wafer to be tested, the defect distribution map indicating a defect distribution within a surface of the semiconductor wafer to be tested; establishing a three-dimensional model to be tested according to the defect distribution map, wherein an XY plane of the three-dimensional model to be tested corresponds to the surface of the semiconductor wafer to be tested, and a Z-axis of the three-dimensional model to be tested corresponds to the number of defects in each grid unit in the XY plane.

Abstract: The present invention provides a method and apparatus for analyzing a semiconductor wafer for analyzing a defect distribution pattern on a semiconductor wafer to be tested. The method comprises: obtaining a defect distribution map of the semiconductor wafer to be tested, the defect distribution map indicating a defect distribution within a surface of the semiconductor wafer to be tested; establishing a three-dimensional model to be tested according to the defect distribution map, wherein an XY plane of the three-dimensional model to be tested corresponds to the surface of the semiconductor wafer to be tested, and a Z-axis of the three-dimensional model to be tested corresponds to the number of defects in each grid unit in the XY plane.

Abstract: The present invention provides a detection device for a cassette comprising at least one supporting unit, each supporting unit comprising a plurality of supporting brackets which constitute a supporting plane, wherein the detection device comprises a sensing mechanism for detecting whether position of each of the supporting brackets in each supporting unit is within a predetermined range. In the present invention, through detecting positions of the supporting brackets in the cassette, and then judging whether the positions of the supporting brackets in each supporting unit are in a preset range, a supporting unit in which there is one or more bracket supporting brackets whose positions are not in the preset range can be maintained in time, and therefore, damage to the glass substrate due to large error in positions of the supporting brackets can be prevented.

Abstract: The present invention provides a detection device for a cassette comprising at least one supporting unit, each supporting unit comprising a plurality of supporting brackets which constitute a supporting plane, wherein the detection device comprises a sensing mechanism for detecting whether position of each of the supporting brackets in each supporting unit is within a predetermined range. In the present invention, through detecting positions of the supporting brackets in the cassette, and then judging whether the positions of the supporting brackets in each supporting unit are in a preset range, a supporting unit in which there is one or more bracket supporting brackets whose positions are not in the preset range can be maintained in time, and therefore, damage to the glass substrate due to large error in positions of the supporting brackets can be prevented.