Patents by Inventor Jie J. ZHANG

Jie J. ZHANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Magnetron design for improved bottom coverage and uniformity
    Patent number: 12176191
    Abstract: A magnet assembly for a magnetron of a processing chamber includes a support member. A plurality of magnetic tracks is mounted to the support member. Each magnetic track includes a pair of magnetic poles. A partial magnetic track is mounted to the support member. The partial magnetic track includes a single unpaired magnetic pole. The partial magnetic track is mounted proximal to a center of rotation of the support member.
    Type: Grant
    Filed: June 26, 2023
    Date of Patent: December 24, 2024
    Assignee: Applied Materials, Inc.
    Inventors: Cory Lafollett, Jie J. Zhang
  • Magnetron Design for Improved Bottom Coverage and Uniformity
    Publication number: 20240290593
    Abstract: A magnet assembly for a magnetron of a processing chamber includes a support member. A plurality of magnetic tracks is mounted to the support member. Each magnetic track includes a pair of magnetic poles. A partial magnetic track is mounted to the support member. The partial magnetic track includes a single unpaired magnetic pole. The partial magnetic track is mounted proximal to a center of rotation of the support member.
    Type: Application
    Filed: June 26, 2023
    Publication date: August 29, 2024
    Inventors: Cory LAFOLLETT, Jie J. ZHANG