Patents by Inventor Jiefei FU

Jiefei FU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220359568
    Abstract: A memory device includes a stacked structure. The stacked structure includes a plurality of interlayer dielectric layers and a gate structure between adjacent interlayer dielectric layers. A charge trapping layer and a blocking layer are between the adjacent interlayer dielectric layers. The blocking layer envelops the charge trapping layer and separates the charge trapping layer from the gate structure. A tunneling layer is disposed along a sidewall of the stacked structure and in contact with each of the gate structure and the charge trapping layer. A channel layer is disposed on a sidewall of the tunneling layer.
    Type: Application
    Filed: July 25, 2022
    Publication date: November 10, 2022
    Inventors: Qiguang WANG, Jiefei FU
  • Patent number: 11469245
    Abstract: A method for fabricating a memory device includes providing an initial semiconductor structure, including a base substrate, a stack structure of interlayer dielectric layers and first sacrificial layers; a channel trench formed through the stack structure. The method includes removing a portion of each first sacrificial layer from the channel trench to form a trapping-layer trench; forming a second sacrificial layer in the trapping-layer trench; forming a charge trapping film to fill the trapping-layer trench; and removing a portion of the charge trapping film from the channel trench to form a charge trapping layer; forming a tunneling layer and a channel layer on the sidewalls of the channel trench; removing the first sacrificial layers and the second sacrificial layer; forming a blocking layer on the charge trapping layer; and forming gate structures, in contact with the tunneling layer, between adjacent interlayer dielectric layers.
    Type: Grant
    Filed: June 18, 2020
    Date of Patent: October 11, 2022
    Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
    Inventors: Qiguang Wang, Jiefei Fu
  • Publication number: 20210288063
    Abstract: A method for fabricating a memory device includes providing an initial semiconductor structure, including a base substrate, a stack structure of interlayer dielectric layers and first sacrificial layers; a channel trench formed through the stack structure. The method includes removing a portion of each first sacrificial layer from the channel trench to form a trapping-layer trench; forming a second sacrificial layer in the trapping-layer trench; forming a charge trapping film to fill the trapping-layer trench; and removing a portion of the charge trapping film from the channel trench to form a charge trapping layer; forming a tunneling layer and a channel layer on the sidewalls of the channel trench; removing the first sacrificial layers and the second sacrificial layer; forming a blocking layer on the charge trapping layer; and forming gate structures, in contact with the tunneling layer, between adjacent interlayer dielectric layers.
    Type: Application
    Filed: June 18, 2020
    Publication date: September 16, 2021
    Inventors: Qiguang WANG, Jiefei FU