Patents by Inventor Jieguang Huo

Jieguang Huo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20100136737
    Abstract: Techniques for manufacturing a CMOS image sensor are provided. A semiconductor substrate is provided, and at least one isolation region can be formed between a periphery region of the substrate and a photo-sensing region of the substrate. A first well in the periphery region and a second well in the photo-sensing region of the substrate are formed. A third well associated with a photodiode is also formed. A gate oxide layer, polysilicon layer, and first metal layer are respectively deposited. The polysilicon layer and first metal layer are etched to form an least one gate in the photo-sensing region and at least one gate in the periphery region. At least two doped regions in the first well are formed, as well as a doped region in the second well. A silicide block layer is deposited over the photo-sensing region of the substrate. A second metal layer is deposited at least over the periphery region after deposition of the silicide block. The substrate is exposed to a thermal environment to form silicide.
    Type: Application
    Filed: February 4, 2010
    Publication date: June 3, 2010
    Applicant: Semiconductor Manufacturing International
    Inventors: Jianping Yang, Jieguang Huo, Chunyan Xin
  • Patent number: 7700399
    Abstract: Techniques for manufacturing a CMOS image sensor are provided. A semiconductor substrate is provided, and at least one isolation region can be formed between a periphery region of the substrate and a photo-sensing region of the substrate. A first well in the periphery region and a second well in the photo-sensing region of the substrate are formed. A third well associated with a photodiode is also formed. A gate oxide layer, polysilicon layer, and first metal layer are respectively deposited. The polysilicon layer and first metal layer are etched to form an least one gate in the photo-sensing region and at least one gate in the periphery region. At least two doped regions in the first well are formed, as well as a doped region in the second well. A silicide block layer is deposited over the photo-sensing region of the substrate. A second metal layer is deposited at least over the periphery region after deposition of the silicide block. The substrate is exposed to a thermal environment to form silicide.
    Type: Grant
    Filed: October 25, 2005
    Date of Patent: April 20, 2010
    Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: Jianping Yang, Jieguang Huo, Chunyun Xin
  • Publication number: 20100015745
    Abstract: A method of forming a CMOS image sensor device, the method includes providing a semiconductor substrate having a P-type impurity characteristic including a surface region. The method form a first thickness of silicon dioxide in a first region of the surface region, a second thickness of silicon dioxide in a second region of the surface region, and a third thickness of silicon dioxide in a third region of the surface region. The method includes forming a first gate layer overlying the second region and a second gate layer overlying the third region, while exposing a portion of the first thickness of silicon dioxide. An N-type impurity characteristic is formed within a region within a vicinity underlying the first thickness of silicon dioxide in the first region of the surface region to cause formation of a photo diode device characterized by the N-type impurity region and the P-type substrate.
    Type: Application
    Filed: October 27, 2008
    Publication date: January 21, 2010
    Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: Jieguang Huo, Jianping Yang
  • Publication number: 20100009487
    Abstract: A method of forming a CMOS image sensor device. The method includes providing a semiconductor substrate having a P-type impurity characteristic. The semiconductor substrate includes a surface region. The method includes forming a gate oxide layer overlying the surface region and forming a first gate structure overlying a first portion of the gate oxide layer, the first gate structure has a top surface region and at least a side region. The method forms an N-type impurity region in a portion of the semiconductor substrate to form a photodiode device region from the N-type impurity region and the P-type impurity.
    Type: Application
    Filed: September 26, 2008
    Publication date: January 14, 2010
    Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: Jieguang Huo, Jianping Yang
  • Patent number: 7582522
    Abstract: A method and device for image sensing. The method includes forming a first well and a second well in a substrate, forming a gate oxide layer on the substrate, and depositing a first gate region and a second gate region on the gate oxide layer. The first gate region is associated with the first well, and the second gate region is associated with the second well. Additionally, the method includes forming a third well in the substrate, implanting a first plurality of ions to form a first lightly doped source region and a first lightly doped drain region in the first well, implanting a second plurality of ions to form at least a second lightly doped drain region in the second well, and implanting a third plurality of ions to form a source in the second well.
    Type: Grant
    Filed: December 18, 2007
    Date of Patent: September 1, 2009
    Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: Jianping Yang, Chunyan Xin, Jieguang Huo, Yanyong Wang
  • Publication number: 20080145963
    Abstract: The present invention provides a method for fabricating a pixel cell of CMOS image sensor, comprising: preparing a semiconductor substrate divided into region I and region II; forming an insulation layer on the surface of the semiconductor substrate in the region I and a gate dielectric layer on the surface of the semiconductor substrate in the region II; forming a poly-silicon gate on the surface of the semiconductor substrate in the region II; forming a deep doped well in the region I through an ion implantation with high energy; performing an ion implantation with low energy in the region I and an ion implantation for lightly doped source/drain in the region II simultaneously; and forming source/drain regions in the semiconductor substrate in the region II.
    Type: Application
    Filed: October 11, 2007
    Publication date: June 19, 2008
    Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: Jianping Yang, Jieguang Huo
  • Publication number: 20080128770
    Abstract: A method and device for image sensing. The method includes forming a first well and a second well in a substrate, forming a gate oxide layer on the substrate, and depositing a first gate region and a second gate region on the gate oxide layer. The first gate region is associated with the first well, and the second gate region is associated with the second well. Additionally, the method includes forming a third well in the substrate, implanting a first plurality of ions to form a first lightly doped source region and a first lightly doped drain region in the first well, implanting a second plurality of ions to form at least a second lightly doped drain region in the second well, and implanting a third plurality of ions to form a source in the second well.
    Type: Application
    Filed: December 18, 2007
    Publication date: June 5, 2008
    Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: Jianping Yang, Chunyan Xin, Jieguang Huo, Yanyong Wang
  • Patent number: 7335546
    Abstract: A method and device for image sensing. The method includes forming a first well and a second well in a substrate, forming a gate oxide layer on the substrate, and depositing a first gate region and a second gate region on the gate oxide layer. The first gate region is associated with the first well, and the second gate region is associated with the second well. Additionally, the method includes forming a third well in the substrate, implanting a first plurality of ions to form a first lightly doped source region and a first lightly doped drain region in the first well, implanting a second plurality of ions to form at least a second lightly doped drain region in the second well, and implanting a third plurality of ions to form a source in the second well.
    Type: Grant
    Filed: July 19, 2005
    Date of Patent: February 26, 2008
    Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: Jianping Yang, Chunyan Xin, Jieguang Huo, Yanyong Wang
  • Publication number: 20060292730
    Abstract: A method and device for image sensing. The method includes forming a first well and a second well in a substrate, forming a gate oxide layer on the substrate, and depositing a first gate region and a second gate region on the gate oxide layer. The first gate region is associated with the first well, and the second gate region is associated with the second well. Additionally, the method includes forming a third well in the substrate, implanting a first plurality of ions to form a first lightly doped source region and a first lightly doped drain region in the first well, implanting a second plurality of ions to form at least a second lightly doped drain region in the second well, and implanting a third plurality of ions to form a source in the second well.
    Type: Application
    Filed: July 19, 2005
    Publication date: December 28, 2006
    Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: Jianping Yang, Chunyan Xin, Jieguang Huo, Yanyong Wang
  • Publication number: 20060275945
    Abstract: Techniques for manufacturing a CMOS image sensor are provided. A semiconductor substrate is provided, and at least one isolation region can be formed between a periphery region of the substrate and a photo-sensing region of the substrate. A first well in the periphery region and a second well in the photo-sensing region of the substrate are formed. A third well associated with a photodiode is also formed. A gate oxide layer, polysilicon layer, and first metal layer are respectively deposited. The polysilicon layer and first metal layer are etched to form an least one gate in the photo-sensing region and at least one gate in the periphery region. At least two doped regions in the first well are formed, as well as a doped region in the second well. A silicide block layer is deposited over the photo-sensing region of the substrate. A second metal layer is deposited at least over the periphery region after deposition of the silicide block. The substrate is exposed to a thermal environment to form silicide.
    Type: Application
    Filed: October 25, 2005
    Publication date: December 7, 2006
    Applicant: Semiconductor Manufacturing Int'l (Shanghai) Corporation
    Inventors: Jianping Yang, Jieguang Huo, Chunyan Xin