Patents by Inventor Jih-Hsien Yeh

Jih-Hsien Yeh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor process tool
    Publication number: 20080183331
    Abstract: A semiconductor process tool comprises two or more wafer stages for separately receiving wafers carrying or not carrying contaminating material. The semiconductor process tool may further comprise two rot arms, load ports, and two chucks separately used for the wafers. The wafers carrying or not carrying contaminating material can be processed in a same process unit but through different stages, robots, and load ports, that is, different paths, without suffering from cross contamination.
    Type: Application
    Filed: January 31, 2007
    Publication date: July 31, 2008
    Inventor: Jih-Hsien Yeh