Patents by Inventor Jihliang Chen

Jihliang Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor processing chamber substrate holder method and structure
    Patent number: 6865065
    Abstract: A method and system for processing wafers is disclosed. According to one embodiment (100) a chuck system (102) may be situated opposite to an input source (104). A chuck system (102) may apply a force (e.g., mechanical and/or electromagnetic) that deforms a substrate (108). Once deformed, essentially all of a substrate (108) may be oriented at a predetermined angle (e.g., 90°) with respect to an input source (104).
    Type: Grant
    Filed: January 22, 2002
    Date of Patent: March 8, 2005
    Assignee: Advanced Ion Beam Technology, Inc.
    Inventors: Jiong Chen, Jihliang Chen, Jianmin Qiao