Patents by Inventor Ji Liang Yang

Ji Liang Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Scanning electron microscope fabrication of optical gratings
    Patent number: 3961102
    Abstract: A method of making optical gratings by the use of a Scanning Electron Microscope wherein (1) a substrate having a thin film of electron resist thereon is exposed in adjacent areas by an electron dosage and the amount of such dosage and the depth of the thin film are selected such that energy deposition in regions between adjacent exposed areas in said electron resist is below the threshold sensitivity of said resist for development, (2) the development time of the resist is made an inverse function of the electron dosage, and/or (3) the period of the grating is controlled by use of a standard scanning format.
    Type: Grant
    Filed: September 13, 1974
    Date of Patent: June 1, 1976
    Assignee: Cornwell Research Foundation, Inc.
    Inventors: Joseph M. Ballantyne, Chung L. Tang, Lawrence Bryce Rhodes, John J. Turner, Ji Liang Yang