Patents by Inventor Jim Crouch

Jim Crouch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Energy sensors for light beam alignment
    Patent number: 8993976
    Abstract: An apparatus includes a drive laser system producing an amplified light beam of pulses that travels along a drive axis; a beam delivery system that directs the amplified light beam of pulses toward a target region; a target material delivery system that provides a target mixture containing a target material in the target region; two or more sensors radially separated from a main axis that crosses the target region, the two or more sensors being configured to detect energy of ultraviolet electromagnetic radiation emitted from a plasma state of the target material when the amplified light beam of pulses intersects the target mixture; and a controller that receives the output from the two or more sensors. The controller is configured to estimate a relative radial alignment between the target mixture and the drive axis within the target region based on an analysis of the detected energy.
    Type: Grant
    Filed: September 30, 2011
    Date of Patent: March 31, 2015
    Assignee: ASML Netherlands B.V.
    Inventors: Matthew Graham, Steven Chang, Jim Crouch, Igor Fomenkov
  • Energy Sensors for Light Beam Alignment
    Publication number: 20130043401
    Abstract: An apparatus includes a drive laser system producing an amplified light beam of pulses that travels along a drive axis; a beam delivery system that directs the amplified light beam of pulses toward a target region; a target material delivery system that provides a target mixture containing a target material in the target region; two or more sensors radially separated from a main axis that crosses the target region, the two or more sensors being configured to detect energy of ultraviolet electromagnetic radiation emitted from a plasma state of the target material when the amplified light beam of pulses intersects the target mixture; and a controller that receives the output from the two or more sensors. The controller is configured to estimate a relative radial alignment between the target mixture and the drive axis within the target region based on an analysis of the detected energy.
    Type: Application
    Filed: September 30, 2011
    Publication date: February 21, 2013
    Applicant: CYMER, INC.
    Inventors: Matthew Graham, Steven Chang, Jim Crouch, Igor Fomenkov