Abstract: The present photoelectric conversion device includes a photo-receiving surface generating electron-hole pairs due to a distortion of an energy band thereof after receiving light, and two contacts contacting the photo-receiving surface for separating the electron-hole pairs. By this disclosure, a cost-effective, easily-makable photoelectric conversion device made by a clean manufacturing process is provided. A preferred MOS photoelectric conversion device of the present invention is made by using a silicon substrate having an upper surface and a lower surface, growing an oxide layer on the upper surface of the silicon substrate, forming a first metal contact layer on said oxide layer, forming a second metal contact layer on the lower surface of the silicon substrate, and breaking the MOS structure into several parts each having a broken surface to serve as a photo-receiving surface.