Patents by Inventor Jim Onderko

Jim Onderko has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Combination of ellipsometry and optical stress generation and detection
    Patent number: 7903238
    Abstract: A method includes selecting one of performing ellipsometry or performing optical stress generation and detection. The method also includes, in response to selecting performing ellipsometry, applying at least one first control signal to a controllable retarder that modifies at least polarization of a light beam, and performing ellipsometry using the modified light beam. The method further includes, in response to selecting performing optical stress generation and detection, applying at least one second control signal to the controllable retarder, and performing optical stress generation and detection using the modified light beam. Apparatus and computer readable media are also disclosed.
    Type: Grant
    Filed: July 9, 2007
    Date of Patent: March 8, 2011
    Assignee: Rudolph Technologies, Inc.
    Inventors: Manjusha Mehendale, Michael J. Kotelyanskii, Yanwen Hou, Jim Onderko, Guray Tas
  • Combination of ellipsometry and optical stress generation and detection
    Publication number: 20090244516
    Abstract: A method includes selecting one of performing ellipsometry or performing optical stress generation and detection. The method also includes, in response to selecting performing ellipsometry, applying at least one first control signal to a controllable retarder that modifies at least polarization of a light beam, and performing ellipsometry using the modified light beam. The method further includes, in response to selecting performing optical stress generation and detection, applying at least one second control signal to the controllable retarder, and performing optical stress generation and detection using the modified light beam. Apparatus and computer readable media are also disclosed.
    Type: Application
    Filed: July 9, 2007
    Publication date: October 1, 2009
    Inventors: Manjusha Mehendale, Michael J. Kotelyanskii, Yanwen Hou, Jim Onderko, Guray Tas