Patents by Inventor Jim Tietz

Jim Tietz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Multiple frequency plasma processor method and apparatus
    Patent number: 7405521
    Abstract: A workpiece is processed with a plasma in a vacuum plasma processing chamber by exciting the plasma at several frequencies such that the excitation of the plasma by the several frequencies simultaneously causes several different phenomena to occur in the plasma. The chamber includes central top and bottom electrodes and a peripheral top and/or bottom electrode arrangement that is either powered by RF or is connected to a reference potential by a filter arrangement that passes at least one of the plasma excitation frequencies to the exclusion of other frequencies.
    Type: Grant
    Filed: August 22, 2003
    Date of Patent: July 29, 2008
    Assignee: Lam Research Corporation
    Inventors: Raj Dhindsa, S. M. Reza Sadjadi, Felix Kozakevich, Dave Trussell, Lumin Li, Eric Lenz, Camelia Rusu, Mukund Srinivasan, Aaron Eppler, Jim Tietz, Jeffrey Marks
  • Multiple frequency plasma etch reactor
    Publication number: 20050039682
    Abstract: A workpiece is processed with a plasma in a vacuum plasma processing chamber by exciting the plasma at several frequencies such that the excitation of the plasma by the several frequencies simultaneously causes several different phenomena to occur in the plasma. The chamber includes central top and bottom electrodes and a peripheral top and/or bottom electrode arrangement that is either powered by RF or is connected to a reference potential by a filter arrangement that passes at least one of the plasma excitation frequencies to the exclusion of other frequencies.
    Type: Application
    Filed: August 22, 2003
    Publication date: February 24, 2005
    Inventors: Raj Dhindsa, S.M. Sadjadi, Felix Kozakevich, Dave Trussell, Lumin Li, Eric Lenz, Camelia Rusu, Mukund Srinivasan, Aaron Eppler, Jim Tietz, Jeffrey Marks