Patents by Inventor Jim Van Gogh

Jim Van Gogh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Forming tin thin films using remote activated specie generation
    Patent number: 6071572
    Abstract: In a vapor deposition chamber which holds a substrate for processing, a method including the steps of forming a layer of material on the surface of the substrate, wherein the layer of material is made of Ti atoms; remotely activating a source gas containing nitrogen so as to produce activated nitrogen gas species; and while forming the layer of material on the substrate, injecting the activated nitrogen species into the processing chamber to increase the population of activated nitrogen species that is incorporated into the layer of material that is being formed.
    Type: Grant
    Filed: October 15, 1996
    Date of Patent: June 6, 2000
    Assignee: Applied Materials, Inc.
    Inventors: Roderick C. Mosely, Jim Van Gogh, Karl A. Littau