Patents by Inventor Jim Ye

Jim Ye has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD AND APPARATUS FOR PULSE GAS DELIVERY WITH CONCENTRATION MEASUREMENT
    Publication number: 20230031118
    Abstract: A system and method provides a more precise mole delivery amount of a process gas, for each pulse of a pulse gas delivery, by measuring a concentration of the process gas and controlling the amount of gas mixture delivered in a pulse of gas flow based on the received concentration of the process gas. The control of mole delivery amount for each pulse can be achieved by adjusting flow setpoint, pulse duration, or both.
    Type: Application
    Filed: January 11, 2021
    Publication date: February 2, 2023
    Inventors: Jim Ye, Vidi Saptari, Junhua Ding
  • Method and apparatus for pulse gas delivery with concentration measurement
    Patent number: 11513108
    Abstract: A system and method provides a more precise mole delivery amount of a process gas, for each pulse of a pulse gas delivery, by measuring a concentration of the process gas and controlling the amount of gas mixture delivered in a pulse of gas flow based on the received concentration of the process gas. The control of mole delivery amount for each pulse can be achieved by adjusting flow setpoint, pulse duration, or both.
    Type: Grant
    Filed: January 14, 2020
    Date of Patent: November 29, 2022
    Assignee: MKS Instruments, Inc.
    Inventors: Jim Ye, Vidi Saptari, Junhua Ding
  • Method and Apparatus for Pulse Gas Delivery with Concentration Measurement
    Publication number: 20210215655
    Abstract: A system and method provides a more precise mole delivery amount of a process gas, for each pulse of a pulse gas delivery, by measuring a concentration of the process gas and controlling the amount of gas mixture delivered in a pulse of gas flow based on the received concentration of the process gas. The control of mole delivery amount for each pulse can be achieved by adjusting flow setpoint, pulse duration, or both.
    Type: Application
    Filed: January 14, 2020
    Publication date: July 15, 2021
    Inventors: Jim Ye, Vidi Saptari, Junhua Ding