Patents by Inventor Jiming FAN

Jiming FAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Scan reflective mirror monitoring system and method, focusing and leveling system
    Patent number: 10394142
    Abstract: A scanning mirror monitoring system and method as well as a focusing and leveling system are disclosed. The scanning mirror monitoring system includes a simple harmonic motion detector unit and a signal processing unit (25). The simple harmonic motion detector unit monitors a simple harmonic motion of a scanning mirror (8) and produces a simple harmonic signal. The signal processing unit (25) receives the simple harmonic signal and instructs a scanning mirror actuator unit (27) to adjust the amplitude and/or position of the scanning mirror (8) based on a variation found in the simple harmonic signal. The signal processing unit (25) identifies the variation by monitoring an optical intensity profile.
    Type: Grant
    Filed: January 23, 2017
    Date of Patent: August 27, 2019
    Assignee: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    Inventors: Jiming Fan, Haijiang Wang
  • SCAN REFLECTIVE MIRROR MONITORING SYSTEM AND METHOD, FOCUSING AND LEVELING SYSTEM
    Publication number: 20190025718
    Abstract: A scanning mirror monitoring system and method as well as a focusing and leveling system are disclosed. The scanning mirror monitoring system includes a simple harmonic motion detector unit and a signal processing unit (25). The simple harmonic motion detector unit monitors a simple harmonic motion of a scanning mirror (8) and produces a simple harmonic signal. The signal processing unit (25) receives the simple harmonic signal and instructs a scanning mirror actuator unit (27) to adjust the amplitude and/or position of the scanning mirror (8) based on a variation found in the simple harmonic signal. The signal processing unit (25) identifies the variation by monitoring an optical intensity profile.
    Type: Application
    Filed: January 23, 2017
    Publication date: January 24, 2019
    Inventors: Jiming FAN, Haijiang WANG