Patents by Inventor Jimmy Erik Granstrom

Jimmy Erik Granstrom has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • HIGH MOLECULAR WEIGHT POLYVINYL PYRROLIDONE FOR LOW-K REMOVAL RATE SUPPRESION
    Publication number: 20210079263
    Abstract: Provided herein are compositions and methods for polishing surfaces comprising one or more low-k materials and optionally one or more additional materials (e.g., Cu, Ta, Co, Ni, etc.), e.g., in semiconductor device fabrication. Embodiments include a composition for chemical mechanical polishing of a surface comprising a low-k material (e.g., Black Diamond (BD)) the composition comprising an abrasive, a solvent, and a polymeric low-k suppressor.
    Type: Application
    Filed: August 7, 2020
    Publication date: March 18, 2021
    Applicant: FUJIMI INCORPORATED
    Inventor: Jimmy Erik GRANSTROM
  • POLISHING COMPOSITION
    Publication number: 20190031919
    Abstract: Described herein are polishing compositions comprising abrasive grains, an additive, and a water-soluble polymer, wherein the compositions have a pH of less than 4.
    Type: Application
    Filed: January 13, 2017
    Publication date: January 31, 2019
    Applicant: FUJIMI INCORPORATED
    Inventors: Hisashi TAKEDA, Jimmy Erik GRANSTROM, Fusayo SAEKI
  • POLISHING COMPOSITION USING AMINO ACIDS
    Publication number: 20180273802
    Abstract: Provided herein are methods and compositions for chemical mechanical polishing (CMP) of copper (Cu) and ruthenium (Ru) barrier films in the fabrication of Cu interconnect wiring through damascene process. Particularly useful application of the present methods and composition is during fabrication of fine Cu lines in Ru patterned substrates. The present method and composition involve the use of complexing agent having at least one carboxyl group and at least one amino group, and preferably a hydrophobic side chain.
    Type: Application
    Filed: March 16, 2018
    Publication date: September 27, 2018
    Applicant: FUJIMI INCORPORATED
    Inventors: Jimmy Erik Granstrom, Hisashi Takeda