Patents by Inventor Jimmy Iskandar
Jimmy Iskandar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230376374Abstract: A method includes identifying trace data including a plurality of data points, the trace data being associated with production, via a substrate processing system, of substrates having property values that meet threshold values. The method further includes determining, based on a guardband, guardband violation data points of the plurality of data points of the trace data. The method further includes determining, based on the guardband violation data points, guardband violation shape characterization. Classification of additional guardband violation data points of additional trace data is to be based on the guardband violation shape characterization. Performance of a corrective action associated with the substrate processing system is based on the classification.Type: ApplicationFiled: May 19, 2022Publication date: November 23, 2023Inventors: Jimmy Iskandar, Fei Li, James Robert Moyne
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Publication number: 20230376373Abstract: A method includes identifying trace data including a plurality of data points, the trace data being associated with production, via a substrate processing system, of substrates having property values that meet threshold values. The method further includes generating, based on the trace data and a plurality of allowable types of variance, a guardband including an upper limit and a lower limit for fault detection. The method further includes causing, based on the guardband, performance of a corrective action associated with the substrate processing system.Type: ApplicationFiled: May 19, 2022Publication date: November 23, 2023Inventors: Fei Li, Jimmy Iskandar, James Robert Moyne
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Publication number: 20230376020Abstract: A method includes identifying trace data including a plurality of data points, the trace data being associated with production, via a substrate processing system, of substrates that have property values that meet threshold values. The method further includes determining, based on the trace data, a dynamic acceptable area outside of guardband limits. The method further includes causing, based on the dynamic acceptable area outside of the guardband limits, performance of a corrective action associated with the substrate processing system.Type: ApplicationFiled: May 19, 2022Publication date: November 23, 2023Inventors: Jimmy Iskandar, Fei Li, James Robert Moyne
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Patent number: 11789427Abstract: A method includes receiving one or more fingerprint dimensions to be used to generate a fingerprint. The method further includes receiving trace data associated with a manufacturing process. The method further includes applying the one or more fingerprint dimensions to the trace data to generate at least one feature. The method further includes generating the fingerprint based on the at least one feature. The method further includes causing, based on the fingerprint, performance of a corrective action associated with one or more manufacturing processes.Type: GrantFiled: October 26, 2021Date of Patent: October 17, 2023Assignee: Applied Materials, Inc.Inventors: James Robert Moyne, Jimmy Iskandar
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Publication number: 20230259585Abstract: Implementations disclosed describe systems and techniques to detect anomalies in a manufacturing operation. The techniques include generating, using a plurality of outlier detection models, a plurality of outlier scores. The outlier scores are representative of a degree of presence, in a plurality of sensor statistics, of an anomaly associated with the manufacturing operation. Individual outlier scores are generated using a respective one of the plurality of outlier detection models. The techniques further include determining, using the outlier scores, a likelihood of the anomaly associated with the manufacturing operation.Type: ApplicationFiled: April 19, 2023Publication date: August 17, 2023Inventors: Jimmy Iskandar, Michael D. Armacost
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Patent number: 11657122Abstract: Implementations disclosed describe a method and a system to perform the method of obtaining a reduced representation of a plurality of sensor statistics representative of data collected by a plurality of sensors associated with a device manufacturing system performing a manufacturing operation. The method further includes generating, using a plurality of outlier detection models, a plurality of outlier scores, each of the plurality of outlier scores generated based on the reduced representation of the plurality of sensor statistics using a respective one of the plurality of outlier detection models. The method further includes processing the plurality of outlier scores using a detector neural network to generate an anomaly score indicative of a likelihood of an anomaly associated with the manufacturing operation.Type: GrantFiled: July 16, 2020Date of Patent: May 23, 2023Assignee: Applied Materials, Inc.Inventors: Jimmy Iskandar, Michael D. Armacost
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Publication number: 20230126028Abstract: A method includes receiving one or more fingerprint dimensions to be used to generate a fingerprint. The method further includes receiving trace data associated with a manufacturing process. The method further includes applying the one or more fingerprint dimensions to the trace data to generate at least one feature. The method further includes generating the fingerprint based on the at least one feature. The method further includes causing, based on the fingerprint, performance of a corrective action associated with one or more manufacturing processes.Type: ApplicationFiled: October 26, 2021Publication date: April 27, 2023Inventors: James Robert Moyne, Jimmy Iskandar
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Patent number: 11610076Abstract: A method includes receiving, from sensors, current trace data including current sensor values associated with producing products. The method further includes processing the current trace data to identify features of the current trace data and providing the features of the current trace data as input to a trained machine learning model that uses a hyperplane limit for product classification. The method further includes obtaining, from the trained machine learning model, outputs indicative of predictive data associated with the hyperplane limit and processing the predictive data and the hyperplane limit to determine: first products associated with a first product classification and second products associated with a second product classification based exclusively on the subset of the plurality of features; and third products associated with the first product classification or the second product classification based on an additional feature not within the subset.Type: GrantFiled: August 7, 2019Date of Patent: March 21, 2023Assignee: Applied Materials, Inc.Inventors: Jimmy Iskandar, James Robert Moyne
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Publication number: 20220019863Abstract: Implementations disclosed describe a method and a system to perform the method of obtaining a reduced representation of a plurality of sensor statistics representative of data collected by a plurality of sensors associated with a device manufacturing system performing a manufacturing operation. The method further includes generating, using a plurality of outlier detection models, a plurality of outlier scores, each of the plurality of outlier scores generated based on the reduced representation of the plurality of sensor statistics using a respective one of the plurality of outlier detection models. The method further includes processing the plurality of outlier scores using a detector neural network to generate an anomaly score indicative of a likelihood of an anomaly associated with the manufacturing operation.Type: ApplicationFiled: July 16, 2020Publication date: January 20, 2022Inventors: Jimmy Iskandar, Michael D. Armacost
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Patent number: 11126172Abstract: Described herein are methods, apparatuses, and systems for reducing equipment repair time. In one embodiment, a computer implemented method includes collecting test substrate data or other metrology data and fault detection data for maintenance recovery of at least one manufacturing tool in a manufacturing facility and determining a relationship between tool parameter settings for the manufacturing tool and the test substrate data. The method further includes utilizing virtual metrology predictive algorithms and at least some collected data to obtain a metrology prediction and applying multivariate run-to-run (R2R) control modeling to obtain a state estimation including a current operating region of the at least one manufacturing tool. Applying multivariate run-to-run (R2R) control modeling to obtain tool parameter adjustments for at least one manufacturing tool to reduce maintenance recovery time and to reduce requalification time.Type: GrantFiled: August 12, 2019Date of Patent: September 21, 2021Assignee: Applied Materials, Inc.Inventors: Jimmy Iskandar, Jianping Zou, Parris C. M. Hawkins, James Moyne
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Patent number: 11054815Abstract: Techniques are provided for classifying runs of a recipe within a manufacturing environment. Embodiments monitor a plurality of runs of a recipe to collect runtime data from a plurality of sensors within a manufacturing environment. Qualitative data describing each semiconductor devices produced by the plurality of runs is determined. Embodiments characterize each run into a respective group, based on an analysis of the qualitative data, and generate a data model based on the collected runtime data. A multivariate analysis of additional runtime data collected during at least one subsequent run of the recipe is performed to classify the at least one subsequent run into a first group. Upon classifying the at least one subsequent run, embodiments output for display an interface depicting a ranking sensor types based on the additional runtime data and the description of relative importance of each sensor type for the first group within the data model.Type: GrantFiled: March 13, 2017Date of Patent: July 6, 2021Assignee: Applied Materials, Inc.Inventors: Bradley D. Schulze, Suketu Arun Parikh, Jimmy Iskandar, Jigar Bhadriklal Patel
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Patent number: 11022968Abstract: Described herein are methods, apparatuses, and systems for reducing equipment repair time. Disclosed methods include collecting data including test substrate data or other metrology data and fault detection data for maintenance recovery of at least one manufacturing tool in a manufacturing facility. Disclosed methods include determining a relationship between tool parameter settings for the at least one manufacturing tool and at least some collected data including the test substrate data. The disclosure includes utilizing virtual metrology predictive algorithms and at least some collected data to obtain a metrology prediction and applying multivariate run-to-run (R2R) control modeling to obtain a tool parameter adjustment for at least one target parameter for the at least one manufacturing tool. The disclosure further includes applying the R2R control modeling to obtain tool parameter adjustments for at least one manufacturing tool.Type: GrantFiled: August 12, 2019Date of Patent: June 1, 2021Assignee: Applied Materials, Inc.Inventors: Jimmy Iskandar, Jianping Zou, Parris C. M. Hawkins, James Moyne
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Publication number: 20210116898Abstract: A method includes identifying first parameters of a first processing chamber of a semiconductor fabrication facility. The first parameters include first input parameters and first output parameters. The method further includes identifying second parameters of a second processing chamber of the semiconductor fabrication facility. The second parameters include second input parameters and second output parameters. The method further includes generating, by a processing device based on the first parameters and the second parameters, composite parameters comprising composite input parameters and composite output parameters. Semiconductor fabrication is based on the composite parameters.Type: ApplicationFiled: December 30, 2020Publication date: April 22, 2021Inventors: James Robert Moyne, Jimmy Iskandar
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Publication number: 20210042570Abstract: A method includes receiving, from sensors, current trace data including current sensor values associated with producing products. The method further includes processing the current trace data to identify features of the current trace data and providing the features of the current trace data as input to a trained machine learning model that uses a hyperplane limit for product classification. The method further includes obtaining, from the trained machine learning model, outputs indicative of predictive data associated with the hyperplane limit and processing the predictive data and the hyperplane limit to determine: first products associated with a first product classification and second products associated with a second product classification based exclusively on the subset of the plurality of features; and third products associated with the first product classification or the second product classification based on an additional feature not within the subset.Type: ApplicationFiled: August 7, 2019Publication date: February 11, 2021Inventors: Jimmy Iskandar, James Robert Moyne
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Patent number: 10901407Abstract: Embodiments provide techniques for compressing sensor data collected within a manufacturing environment. One embodiment monitors a plurality of runs of a recipe for fabricating one or more semiconductor devices within a manufacturing environment to collect runtime data from a plurality of sensors within the manufacturing environment. The collected runtime data is compressed by generating, for each of the plurality of sensors and for each of the plurality of runs, a respective representation of the corresponding runtime data that describes a shape of the corresponding runtime data and a magnitude of the corresponding runtime data. A query specifying one or more runtime data attributes is received and executed against the compressed runtime data to generate query results, by comparing the one or more runtime data attributes to at least one of the generated representations of runtime data.Type: GrantFiled: May 31, 2017Date of Patent: January 26, 2021Assignee: Applied Materials, Inc.Inventors: Jimmy Iskandar, Michael D. Armacost, Heng Hao
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Patent number: 10884400Abstract: Described herein are methods and systems for chamber matching in a manufacturing facility. A method may include receiving a first chamber recipe advice for a first chamber and a second chamber recipe advice for a second chamber. The chamber recipe advices describe a set of tunable inputs and a set of outputs for a process. The method may further include adjusting at least one of the set of first chamber input parameters or the set of second chamber input parameters and at least one of the set of first chamber output parameters or the set of second chamber output parameters to substantially match the first and second chamber recipe advices.Type: GrantFiled: February 28, 2017Date of Patent: January 5, 2021Assignee: Applied Materials, Inc.Inventors: James Robert Moyne, Jimmy Iskandar
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Publication number: 20200004234Abstract: Described herein are methods, apparatuses, and systems for reducing equipment repair time. In one embodiment, a computer implemented method includes collecting, with a system, data including test substrate data or other metrology data and fault detection data for maintenance recovery of at least one manufacturing tool in a manufacturing facility and determining, with the system, a relationship between tool parameter settings for the at least one manufacturing tool and at least some collected data including the test substrate data. The method further includes utilizing zero or more virtual metrology predictive algorithms and at least some collected data to obtain a metrology prediction and applying multivariate run-to-run (R2R) control modeling to obtain a state estimation including a current operating region of the at least one manufacturing tool based on the test substrate data and obtain at least one tool parameter adjustment for at least one target parameter for the at least one manufacturing tool.Type: ApplicationFiled: August 12, 2019Publication date: January 2, 2020Inventors: Jimmy ISKANDAR, Jianping ZOU, Parris C.M. HAWKINS, James MOYNE
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Publication number: 20190361429Abstract: Described herein are methods, apparatuses, and systems for reducing equipment repair time. In one embodiment, a computer implemented method includes collecting, with a system, data including test substrate data or other metrology data and fault detection data for maintenance recovery of at least one manufacturing tool in a manufacturing facility and determining, with the system, a relationship between tool parameter settings for the at least one manufacturing tool and at least some collected data including the test substrate data. The method further includes utilizing zero or more virtual metrology predictive algorithms and at least some collected data to obtain a metrology prediction and applying multivariate run-to-run (R2R) control modeling to obtain a state estimation including a current operating region of the at least one manufacturing tool based on the test substrate data and obtain at least one tool parameter adjustment for at least one target parameter for the at least one manufacturing tool.Type: ApplicationFiled: August 12, 2019Publication date: November 28, 2019Inventors: Jimmy ISKANDAR, Jianping ZOU, Parris C.M. HAWKINS, James MOYNE
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Patent number: 10303812Abstract: Embodiments presented herein provide techniques for predicting the topography of a product produced from a manufacturing process. One embodiment includes generating a plurality of prediction models. Each of the plurality of prediction models corresponds to a respective one of a plurality of positional coordinates of a product produced from a manufacturing process. The method also includes receiving a set of user-specified input parameters to apply to the manufacturing control process. The method further includes generating a graphical representation of a topography map for the product for the user-specified of input parameters based on the plurality of prediction models.Type: GrantFiled: August 8, 2016Date of Patent: May 28, 2019Assignee: Applied Materials, Inc.Inventors: Jimmy Iskandar, Chong Jiang, Michael D. Armacost, Bradley D. Schulze
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Patent number: 10140394Abstract: Embodiments disclosed herein include methods for reducing or eliminating the impact of tuning disturbances during prediction of lamp failure. In one embodiment, the method comprises monitoring data of a lamp module for a process chamber using one or more physical sensors disposed at different locations within the lamp module, creating virtual sensors based on monitoring data of the lamp module, and providing a prediction model for the lamp module using the virtual sensors as inputs.Type: GrantFiled: August 31, 2015Date of Patent: November 27, 2018Assignee: Applied Materials, Inc.Inventors: Subrahmanyam Venkata Rama Kommisetti, Haw Jyue Luo, Jimmy Iskandar, Hsincheng Lai, Parris Hawkins