Patents by Inventor JIN-CHAO LIU

JIN-CHAO LIU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for determining optical constant of material, and method and apparatus for extending material database
    Patent number: 11619578
    Abstract: A method for determining an optical constant of a material includes: acquiring ellipsometric parameters; obtaining a optical constant of the material corresponding to the ellipsometric parameters by a machine learning model; the machine learning model including a mapping relationship between the ellipsometric parameters and the material optical constant of the material corresponding to the ellipsometric parameters. The method uses the machine learning model to implement an automatic fitting of ellipsometric parameters. In the method, the optical constant of the material is calculated by a machine learning model, which no longer depends on the experiences of the experimenters, thereby reducing requirements for the operator, accelerating the fitting of the data curve when calculating the optical constants of the material and improving the operation efficiency.
    Type: Grant
    Filed: June 9, 2020
    Date of Patent: April 4, 2023
    Assignee: NANKAI UNIVERSITY
    Inventors: Meng-Xin Ren, Jin-Chao Liu, Di Zhang, Jing-Jun Xu
  • METHOD AND APPARATUS FOR DETERMINING OPTICAL CONSTANT OF MATERIAL, AND METHOD AND APPARATUS FOR EXTENDING MATERIAL DATABASE
    Publication number: 20200393363
    Abstract: A method for determining an optical constant of a material includes: acquiring ellipsometric parameters; obtaining a optical constant of the material corresponding to the ellipsometric parameters by a machine learning model; the machine learning model including a mapping relationship between the ellipsometric parameters and the material optical constant of the material corresponding to the ellipsometric parameters. The method uses the machine learning model to implement an automatic fitting of ellipsometric parameters. In the method, the optical constant of the material is calculated by a machine learning model, which no longer depends on the experiences of the experimenters, thereby reducing requirements for the operator, accelerating the fitting of the data curve when calculating the optical constants of the material and improving the operation efficiency.
    Type: Application
    Filed: June 9, 2020
    Publication date: December 17, 2020
    Inventors: MENG-XIN REN, JIN-CHAO LIU, DI ZHANG, JING-JUN XU