Abstract: The invention provides an active device and a manufacturing method thereof, the active device disposed on a substrate includes a gate, a gate insulating layer, a metal oxide semiconductor layer, an etch stop layer, a source, and a drain. The gate insulating layer is disposed on the substrate and covers the gate. The metal oxide semiconductor layer is disposed on the gate insulating layer. The etch stop layer is disposed on the metal oxide semiconductor layer. The edges of the metal oxide semiconductor layer are retracted a distance compared to the edges of the etch stop layer. The source and the drain are disposed on the etch stop layer, disposed along the edges of the etch stop layer and the edges of the metal oxide semiconductor layer, and extendedly disposed on the gate insulating layer. A part of the etch stop layer is exposed between the source and the drain.

Abstract: A differential phase-contrast X-ray imaging system is provided. Along the direction of X-ray propagation, the basic components are X-ray tube, filter, object platform, X-ray phase grating, and X-ray detector. The system provides: 1) X-ray beam from parallel-arranged source array with good coherence, high energy, and wider angles of divergence with 30-50 degree. 2) The novel X-ray detector adopted in present invention plays dual roles of conventional analyzer grating and conventional detector. The basic structure of the detector includes a set of parallel-arranged linear array X-ray scintillator screens, optical coupling system, an area array detector or parallel-arranged linear array X-ray photoconductive detector. In this case, relative parameters for scintillator screens or photoconductive detector correspond to phase grating and parallel-arranged line source array, which can provide the coherent X-rays with high energy.

Abstract: A differential phase-contrast X-ray imaging system is provided. Along the direction of X-ray propagation, the basic components are X-ray tube, filter, object platform, X-ray phase grating, and X-ray detector. The system provides: 1) X-ray beam from parallel-arranged source array with good coherence, high energy, and wider angles of divergence with 30-50 degree. 2) The novel X-ray detector adopted in present invention plays dual roles of conventional analyzer grating and conventional detector. The basic structure of the detector includes a set of parallel-arranged linear array X-ray scintillator screens, optical coupling system, an area array detector or parallel-arranged linear array X-ray photoconductive detector. In this case, relative parameters for scintillator screens or photoconductive detector correspond to phase grating and parallel-arranged line source array, which can provide the coherent X-rays with high energy.