Patents by Inventor Jin-chul Yoon

Jin-chul Yoon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for guiding air current in a wafer loading chamber for chemical vapor deposition equipment
    Patent number: 6036781
    Abstract: An air current guiding apparatus includes a plurality of dampers installed on a filter unit on an inner wall of air supply unit for blowing clean air over wafers loaded in a boat for transfer to a reaction chamber for chemical vapor deposition. Each of the dampers has a certain length and angular orientation to force the air in a designated direction so that the air current in a wafer loading chamber maintains an appropriate velocity and is free from air turbulence, thereby minimizing the number of contaminating particles in the wafer loading chamber.
    Type: Grant
    Filed: March 19, 1997
    Date of Patent: March 14, 2000
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Yo-han Ahn, Jin-chul Yoon, Chang-jip Yang, Ho-wang Kim