Patents by Inventor Jinho YEO

Jinho YEO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods of manufacturing pellicle assembly and photomask assembly
    Patent number: 11073757
    Abstract: Methods of manufacturing a pellicle assembly may include forming a sublimable support layer on a first surface of a pellicle membrane, attaching a pellicle frame to a second surface of the pellicle membrane while the sublimable support layer is on the first surface of the pellicle membrane, and sublimating the sublimable support layer while the pellicle frame is attached to the pellicle membrane. In order to manufacture a photomask assembly, a photomask is fixed to the pellicle frame such that the photomask faces the pellicle membrane with the pellicle frame therebetween.
    Type: Grant
    Filed: October 10, 2019
    Date of Patent: July 27, 2021
    Inventors: Mun Ja Kim, Seulgi Kim, Kibong Nam, Jinho Yeo, Jibeom Yoo
  • METHODS OF MANUFACTURING PELLICLE ASSEMBLY AND PHOTOMASK ASSEMBLY
    Publication number: 20200341364
    Abstract: Methods of manufacturing a pellicle assembly may include forming a sublimable support layer on a first surface of a pellicle membrane, attaching a pellicle frame to a second surface of the pellicle membrane while the sublimable support layer is on the first surface of the pellicle membrane, and sublimating the sublimable support layer while the pellicle frame is attached to the pellicle membrane. In order to manufacture a photomask assembly, a photomask is fixed to the pellicle frame such that the photomask faces the pellicle membrane with the pellicle frame therebetween.
    Type: Application
    Filed: October 10, 2019
    Publication date: October 29, 2020
    Inventors: Mun Ja KIM, Seulgi Kim, Kibong NAM, Jinho YEO, Jibeom YOO