Abstract: In accordance with example embodiments, a plasma processing apparatus includes a chamber configured to peform a plasma process, an upper plate on the chamber, an antenna under the upper plate and the antenna is configured to generate plasma in the chamber, an upper insulator between the upper plate and the antenna and the upper insulator covers a top of the antenna, a lower insulator covering a bottom of the antenna, an antenna support ring configured to fix the antenna to the upper plate, and a metal gasket adhered to the antenna support ring.

Abstract: In accordance with example embodiments, a plasma processing apparatus includes a chamber configured to perform a plasma process, an upper plate on the chamber, an antenna under the upper plate and the antenna is configured to generate plasma in the chamber, an upper insulator between the upper plate and the antenna and the upper insulator covers a top of the antenna, a lower insulator covering a bottom of the antenna, an antenna support ring configured to fix the antenna to the upper plate, and a metal gasket adhered to the antenna support ring.

Abstract: Semiconductor devices, and methods of fabricating the same, include forming device isolation regions in a substrate to define active regions, forming gate trenches in the substrate to expose the active regions and device isolation regions, conformally forming a preliminary gate insulating layer including silicon oxide on the active regions exposed in the grate trenches, nitriding the preliminary gate insulating layer using a radio-frequency bias having a frequency of about 13.56 MHz and power between about 100 W and about 300 W to form a nitrided preliminary gate insulating layer including silicon oxynitride, forming a gate electrode material layer on the nitride preliminary gate insulating layer, partially removing the nitrided preliminary gate insulating layer and the gate electrode material layer to respectively form a gate insulating layer and a gate electrode layer, and forming a gate capping layer on the gate electrode layer to fill the gate trenches.

Abstract: Disclosed is a mobile application search method and system using a human activity knowledge database. The mobile application search system includes a user interface unit that provides an input environment to allow a user to input a user query and displays a mobile application search result related to the user query and a mobile application search engine that receives the user query from the user interface unit and searches for a mobile application related to the user query using an activity knowledge database in which a list of elements involved in achieving a plurality of goals that people desire in daily life is stored. The present invention increases the user's satisfaction by solving a word mismatching problem between a user query and a mobile application and improves mobile application search performance using a human activity knowledge database.

Abstract: Disclosed herein is an apparatus for detecting an obstacle for an around view monitoring system including a processor configured to store a plurality of images captured through an imaging device, convert a view of the images, generate a plurality of view conversion images corresponding to the images, compare the view conversion images corresponding to a plurality of images captured at a different time interval, extract a plurality of overlapping areas between the view conversion images, calculate a degree of mismatch of the overlapping areas between the view conversion images, detect a mismatch area in the overlapping areas, classify the mismatch area as an obstacle area, and display a position of the obstacle through a display of a vehicle.

Abstract: Semiconductor devices, and methods of fabricating the same, include forming device isolation regions in a substrate to define active regions, forming gate trenches in the substrate to expose the active regions and device isolation regions, conformally forming a preliminary gate insulating layer including silicon oxide on the active regions exposed in the grate trenches, nitriding the preliminary gate insulating layer using a radio-frequency bias having a frequency of about 13.56 MHz and power between about 100 W and about 300 W to form a nitrided preliminary gate insulating layer including silicon oxynitride, forming a gate electrode material layer on the nitride preliminary gate insulating layer, partially removing the nitrided preliminary gate insulating layer and the gate electrode material layer to respectively form a gate insulating layer and a gate electrode layer, and forming a gate capping layer on the gate electrode layer to fill the gate trenches.

Abstract: A keypad apparatus for an electronic device permits a thinner construction. The keypad apparatus includes a first light guide plate having key buttons molded in one body attached onto the first light guide plate, a second light guide plate disposed under the first light guide plate, a first light source disposed at one side of the first light guide plate, a second light source disposed at one side of the second light guide plate, and key input switches associated with the key buttons.

Abstract: Disclosed is a mobile application search method and system using a human activity knowledge database. The mobile application search system includes a user interface unit that provides an input environment to allow a user to input a user query and displays a mobile application search result related to the user query and a mobile application search engine that receives the user query from the user interface unit and searches for a mobile application related to the user query using an activity knowledge database in which a list of elements involved in achieving a plurality of goals that people desire in daily life is stored. The present invention increases the user's satisfaction by solving a word mismatching problem between a user query and a mobile application and improves mobile application search performance using a human activity knowledge database.

Abstract: In accordance with example embodiments, a plasma processing apparatus includes a chamber configured to perform a plasma process, an upper plate on the chamber, an antenna under the upper plate and the antenna is configured to generate plasma in the chamber, an upper insulator between the upper plate and the antenna and the upper insulator covers a top of the antenna, a lower insulator covering a bottom of the antenna, an antenna support ring configured to fix the antenna to the upper plate, and a metal gasket adhered to the antenna support ring.

Abstract: A keypad apparatus for an electronic device permits a thinner construction. The keypad apparatus includes a first light guide plate having key buttons molded in one body attached onto the first light guide plate, a second light guide plate disposed under the first light guide plate, a first light source disposed at one side of the first light guide plate, a second light source disposed at one side of the second light guide plate, and key input switches associated with the key buttons.

Abstract: Methods of manufacturing a semiconductor device include forming an absorption layer on a surface of a substrate by exposing the surface of the substrate to a first reaction gas at a first temperature. A metal oxide layer is then formed on the surface of the substrate by exposing the absorption layer to a second reaction gas at a second temperature. The first reaction gas may include a precursor containing zirconium (e.g., tetrakis(ethylmethylamino)zirconium) and the second reaction gas may include an oxidizing agent.

Abstract: A toy type learning device and a method of controlling the toy type learning device are disclosed. A toy type input unit outputs a contents request signal in response to a user's key operation. A remote control unit converts the contents request signal into a wireless signal and outputs the wireless signal to a processing unit having a plurality of contents to request a corresponding content. Thus, the toy type learning device and a controlling method of the toy type learning device may extract the corresponding contents in response to the user's key operation and control an output of a multimedia, so that the toy type learning device may be used as a learning assistant for infants or children.

Abstract: A mobile communication terminal and a method for reducing power consumption for driving a hard disk drive (HDD) of a mobile communication terminal are provided when controlling an interface between a transition integrated circuit (TIC) that takes charge of the interface with the HDD built in the mobile communication terminal and the HDD. The terminal and method include producing an HDD access request signal, initializing the TIC by resetting the TIC through a power-on of the TIC, performing an access of the HDD by driving the HDD after the initialization of the TIC is completed, and turning off an operation power of the TIC after the access of the HDD is completed.

Abstract: A flat panel display apparatus includes a main plate, an organic light emitting element, a protecting layer and an attachable-detachable layer. The organic light emitting element includes a first electrode, a second electrode corresponding to the first electrode, and an organic light emitting layer disposed between the first and second electrodes to generate a light based on a current that flows between the first and second electrodes through the organic light emitting layer. The organic light emitting element is on the main plate. The protecting layer is on the organic light emitting element to protect the orgnaic light emitting element. The attachable-detachable layer is on the protecting layer. Therefore, an image display quality is improved, and a manufacturing cost is decreased.

Abstract: A reaction apparatus including: a main body having a reaction chamber with an upper opening thereof, a lid hinge, and a lid combined to the lid hinge, rotationally opening and closing the upper opening; a lifting member having a first end part separated from a rotation axis of the lid and rotatably combined with the lid, and a second end part rotatably combined to the main body, that moves in opening and closing directions; and a driver activating the lifting member. With this configuration, the present invention provides a reaction apparatus, with a lid that is opened and closed readily, and in which the lid parallelly contacts a sealing member, and thereby creating a vacuum in the reaction chamber with ease.

Abstract: A mobile communication terminal and a method for reducing power consumption for driving a hard disk drive (HDD) of a mobile communication terminal are provided when controlling an interface between a transition integrated circuit (TIC) that takes charge of the interface with the HDD built in the mobile communication terminal and the HDD. The terminal and method include producing an HDD access request signal, initializing the TIC by resetting the TIC through a power-on of the TIC, performing an access of the HDD by driving the HDD after the initialization of the TIC is completed, and turning off an operation power of the TIC after the access of the HDD is completed.

Abstract: An inductively-coupled antenna (ICP) in a plasma generating apparatus comprises an inner antenna segment having an annular shape and at least one outer antenna segment approximately concentrically placed outside of the inner antenna segment, and connected to the inner antenna segment in series, wherein at least one of the inner antenna segments and the outer antenna segments have a plurality of annular coils connected in parallel with each other and having a different diameter from each other. Accordingly, the present invention provides an ICP antenna and plasma generating apparatus using the same having a simple structure, a reduced inductance, and an improved uniformity of plasma density.

Abstract: A reaction apparatus including: a main body having a reaction chamber with an upper opening thereof, a lid hinge, and a lid combined to the lid hinge, rotationally opening and closing the upper opening; a lifting member having a first end part separated from a rotation axis of the lid and rotatably combined with the lid, and a second end part rotatably combined to the main body, that moves in opening and closing directions; and a driver activating the lifting member. With this configuration, the present invention provides a reaction apparatus, with a lid that is opened and closed readily, and in which the lid parallelly contacts a sealing member, and thereby creating a vacuum in the reaction chamber with ease.