Patents by Inventor Jin Il SUNG

Jin Il SUNG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • FLOW VELOCITY INCREASING DEVICE AND APPARATUS FOR DEPOSITING THIN FILM INCLUDING THE SAME
    Publication number: 20230313374
    Abstract: A flow velocity increasing device of an apparatus for depositing a thin film includes a device body disposed within the chamber and a flow velocity increasing hole portion formed in the device body and tapered in a direction of gas passage so that a flow velocity of passed gas is faster than that externally.
    Type: Application
    Filed: February 9, 2023
    Publication date: October 5, 2023
    Inventors: Sun Il KIM, Sung Nam YOO, Jin Il SUNG
  • SUBSTRATE PROCESSING APPARATUS AND METHOD OF FABRICATING SAME
    Publication number: 20220139680
    Abstract: A substrate processing apparatus and a method of fabricating the same are proposed. A bonding layer, by which a chuck body and a base plate of an electrostatic chuck device are bonded, is completely covered using a double-sealing structure in which a covering member for preventing a processing gas from infiltrating into the bonding layer and a sealing member for preventing the bonding layer from being damaged are bonded to each other. The durability and the efficiency of the operation of the electrostatic chuck device are improved.
    Type: Application
    Filed: August 21, 2021
    Publication date: May 5, 2022
    Applicant: SEMES CO., LTD.
    Inventors: Dong Mok LEE, Jin Il SUNG