Abstract: Systems and processes for oxide removal from titanium nitride surfaces are provided. In one example implementation, A method includes placing a workpiece on a workpiece support in a processing chamber. The workpiece can have a titanium nitride layer. The method can include performing a plasma-based oxide removal process on the titanium nitride layer. The plasma-based oxide removal process can include: generating one or more species by inducing a plasma in a process gas with a plasma source; and exposing the workpiece to species generated in the plasma. The process gas can include a mixture of a first gas and a second gas. The first gas can include one or more of a hydrogen containing gas and a nitrogen containing gas. The second gas can include a fluorine containing gas.