Patents by Inventor Jin Keon Ku

Jin Keon Ku has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5964629
    Abstract: To form a silicon tip having an undercut, a photoresist pattern having a vertical profile or a positive profile is formed on a silicon substrate and an under-cuted isotropic etching process is then performed using the photoresist pattern as a mask. First and second insulation films are formed on the silicon tip and the silicon substrate except for the silicon tip. The first insulation film is then separated from the second insulation film.
    Type: Grant
    Filed: November 21, 1996
    Date of Patent: October 12, 1999
    Assignee: Electronics and Telecommunications Research Institute
    Inventors: Jong Moon Park, Jin Keon Ku, Ki Hong Kim, Yeong Cheol Hyeon, Min Park