Patents by Inventor Jin Kunika

Jin Kunika has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate etching apparatus and substrate analysis method
    Patent number: 9741627
    Abstract: The present invention provides an etching apparatus suitable for etching polysilicon on a substrate or bulk silicon constituting the substrate. The present invention relates to an etching apparatus including a gas-flow adjusting means that allows etching gas to flow from a periphery of a substrate to substantially a center of the substrate, and relates to a technology capable of etching polysilicon or bulk silicon at a uniform thickness on an entire substrate surface. In addition, the gas-flow adjusting means is installed in a vertically movable manner, and an etching speed can be controlled by an adjustment of the gas-flow adjusting means.
    Type: Grant
    Filed: January 21, 2014
    Date of Patent: August 22, 2017
    Assignee: IAS, INC
    Inventors: Katsuhiko Kawabata, Takuma Hayashi, Mitsumasa Ikeuchi, Sungjae Lee, Jin Kunika
  • SUBSTRATE ETCHING APPARATUS AND SUBSTRATE ANALYSIS METHOD
    Publication number: 20150357249
    Abstract: The present invention provides an etching apparatus suitable for etching polysilicon on a substrate or bulk silicon constituting the substrate. The present invention relates to an etching apparatus including a gas-flow adjusting means that allows etching gas to flow from a periphery of a substrate to substantially a center of the substrate, and relates to a technology capable of etching polysilicon or bulk silicon at a uniform thickness on an entire substrate surface. In addition, the gas-flow adjusting means is installed in a vertically movable manner, and an etching speed can be controlled by an adjustment of the gas-flow adjusting means.
    Type: Application
    Filed: January 21, 2014
    Publication date: December 10, 2015
    Applicant: IAS Inc.
    Inventors: Katsuhiko Kawabata, Takuma Hayashi, Mitsumasa Ikeuchi, Sungjae Lee, Jin Kunika