Patents by Inventor Jin Ming Su

Jin Ming Su has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for monitoring implantation of ions into semiconductor substrates
    Patent number: 6844208
    Abstract: A method for monitoring a dose of a silicon bearing implant is described. The method includes introducing a first implant species through a surface of a semiconductor substrate at a first does of energy level and introducing a silicon bearing species through the surface of the semiconductor substrate at a second dose and a second energy level. The method anneals the semiconductor substrate and measures a sheet resistance value of the surface of the semiconductor substrate. The method also determines the second dose value based upon the surface resistance value.
    Type: Grant
    Filed: June 12, 2003
    Date of Patent: January 18, 2005
    Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: Jin Ming Su, Xiao Sheng Qiang, Li Zi Wang, Chin Te Hunag
  • METHOD AND SYSTEM FOR MONITORING IMPLANTATION OF IONS INTO SEMICONDUCTOR SUBSTRATES
    Publication number: 20040253752
    Abstract: A method for monitoring a dose of a silicon bearing implant. The method includes introducing a first implant species through a surface of a semiconductor substrate at a first dose and a first energy level and introducing a silicon bearing species through the surface of the semiconductor substrate at a second dose and a second energy level. The method anneals the semiconductor substrate and measures a sheet resistance value of the surface of the semiconductor substrate. The method also determines the second dose value based upon the surface resistance value.
    Type: Application
    Filed: June 12, 2003
    Publication date: December 16, 2004
    Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: Jin Ming Su, Xiao Sheng Qiang, Li Zi Wang, Chin Te Hunag