Patents by Inventor Jin-Seock Yoo

Jin-Seock Yoo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Heater block for heating wafer
    Patent number: 6207932
    Abstract: A heater block for heating a wafer comprising a body member; a wafer support disposed on the body member, the wafer support containing a plurality of troughs which extend along the surface thereof; a plurality of heated elements disposed under the wafer support in the body wherein the heat generated from each of the heated elements is transferred to the wafer support; a gas line conmected to the wafer support for supplying gas to the plurality of troughs; means for supplying heat to the heated elements; and a controller connected to the heated elements for controlling the temperature of the heated elements.
    Type: Grant
    Filed: December 30, 1998
    Date of Patent: March 27, 2001
    Assignee: Hyundai Electronics Industries, Co., Ltd.
    Inventor: Jin-Seock Yoo