Patents by Inventor Jin-Seung Oh

Jin-Seung Oh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for manufacturing a contact hole of a semiconductor device
    Patent number: 5294296
    Abstract: In the formation of a contact hole within highly limited area, the size of the contact hole does not vary. For achieving such purpose, after a first polysilicon pattern is formed, a concave portion is formed by isotropically etching the predetermined depth of an insulating layer. A second polysilicon spacer is then formed at the sidewall of the first polysilicon pattern and the concave portion. Using the etching process employing the first polysilicon pattern and the second polysilicon spacer as a mask, the contact hole is formed by etching the insulating layer.
    Type: Grant
    Filed: February 11, 1993
    Date of Patent: March 15, 1994
    Assignee: Hyundai Electronics Industries, Co., Ltd.
    Inventors: Soo-Sik Yoon, Jin-Woong Kim, Jin-Seung Oh, Il-Wook Kim, Hee-Kook Park