Patents by Inventor Jin Sung Rho

Jin Sung Rho has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing system and substrate processing method
    Patent number: 10002777
    Abstract: Provided is a substrate processing system and a substrate processing method. The substrate processing system includes a polishing part for performing a Chemical Mechanical Polishing (CMP) process on a substrate, a cleaning part for cleaning the substrate on which the polishing process is performed, and a substrate transferring part for transferring the substrate to the cleaning part before polishing the substrate in the polishing part. The substrate may be preparatorily cleaned in the cleaning part before the polishing process, and then enters the polishing part.
    Type: Grant
    Filed: November 29, 2016
    Date of Patent: June 19, 2018
    Assignee: KCTECH CO., LTD.
    Inventors: Young Kyu Kweon, Joon Ho An, Byoung Chaul Son, Jin Sung Rho
  • SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
    Publication number: 20170323807
    Abstract: Provided is a substrate processing system and a substrate processing method. The substrate processing system includes a polishing part for performing a Chemical Mechanical Polishing (CMP) process on a substrate, a cleaning part for cleaning the substrate on which the polishing process is performed, and a substrate transferring part for transferring the substrate to the cleaning part before polishing the substrate in the polishing part. The substrate may be preparatorily cleaned in the cleaning part before the polishing process, and then enters the polishing part.
    Type: Application
    Filed: November 29, 2016
    Publication date: November 9, 2017
    Applicant: K.C.Tech Co., Ltd.
    Inventors: Young Kyu Kweon, Joon Ho An, Byoung Chaul Son, Jin Sung Rho