Patents by Inventor Jin Sung SUN

Jin Sung SUN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11986967
    Abstract: The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a plurality of treating chambers performing a respective treatment on a substrate therein; a transfer chamber having a robot transferring the substrate between the plurality of treating chambers; a detection unit mounted on the robot and configured to detect a substrate state; and a controller for controlling the detection unit, wherein the detection unit comprises: an imaging member for imaging the substrate; and a driving member for moving the imaging member, and wherein the controller controls the detection unit to image and store an image of the substrate at an optimal position and determines whether an image of the substrate is a normal state based on the image obtained in the optimal position, the optimal position determined based on a process variable of the treating chamber.
    Type: Grant
    Filed: February 24, 2022
    Date of Patent: May 21, 2024
    Assignee: Semes Co., Ltd.
    Inventors: Tae Kyung Kong, Jin Sung Sun
  • Patent number: 11935779
    Abstract: Various example embodiments provide a transfer hand for transferring a substrate. The transfer hand for transferring the substrate comprises: a body; and a vacuum assembly installed in the body and providing decompression to the bottom surface of a substrate to support the substrate at the upper part of the body; wherein the vacuum assembly comprises: an vacuum pad with conductivity contacting the substrate; and a sealing member provided between the vacuum pad and the body, the sealing member electrically connected to the vacuum pad; wherein the sealing member is grounded.
    Type: Grant
    Filed: October 28, 2021
    Date of Patent: March 19, 2024
    Assignee: SEMES CO., LTD.
    Inventors: Tae Hoon Lee, Ju Won Kim, Jin Sung Sun, Bo Hee Lee
  • Publication number: 20230360951
    Abstract: An apparatus for transporting a substrate includes an actuator, a robot arm, operation of which is controlled by the actuator, a robot hand including at least one intake vent having a predetermined separation distance from the supported substrate, a fixing unit that fixes the substrate supported on the robot hand, and an intake unit connected with the intake vent.
    Type: Application
    Filed: July 14, 2023
    Publication date: November 9, 2023
    Applicant: SEMES CO., LTD.
    Inventors: Tae Kyung KONG, Kiwon HAN, Jin Sung SUN
  • Patent number: 11651979
    Abstract: An apparatus for transferring a substrate is provided. A unit for transferring a substrate, includes a support structure, a first hand to place the substrate, a second hand stacked with the first hand and placing the substrate, a first guide rail guiding movement of a first support rod to support the first hand in the support structure, a second guide rail guiding movement of a second support rod in the support structure to support the second hand, and a pressure reducing member reducing pressure of an exhaust fluid passage provided in the support structure. The exhaust fluid passage includes a first fluid passage communicating with the first guide rail, a second fluid passage communicating with the second guide rail, and a third fluid passage formed by combining the first fluid passage with the second fluid passage. The pressure reducing member reduces pressure of the third fluid passage.
    Type: Grant
    Filed: July 22, 2020
    Date of Patent: May 16, 2023
    Assignee: SEMES CO., LTD.
    Inventors: Tae Kyung Kong, Jin Sung Sun, Kiwon Han
  • Publication number: 20220379485
    Abstract: The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a plurality of treating chambers performing a respective treatment on a substrate therein; a transfer chamber having a robot transferring the substrate between the plurality of treating chambers; a detection unit mounted on the robot and configured to detect a substrate state; and a controller for controlling the detection unit, wherein the detection unit comprises: an imaging member for imaging the substrate; and a driving member for moving the imaging member, and wherein the controller controls the detection unit to image and store an image of the substrate at an optimal position and determines whether an image of the substrate is a normal state based on the image obtained in the optimal position, the optimal position determined based on a process variable of the treating chamber.
    Type: Application
    Filed: February 24, 2022
    Publication date: December 1, 2022
    Applicant: SEMES CO., LTD.
    Inventors: Tae Kyung KONG, Jin Sung SUN
  • Publication number: 20220139756
    Abstract: The inventive concept provides a transfer hand for transferring a substrate. The transfer hand for transferring the substrate comprises: a body; and a vacuuma assembly installed in the body and providing decompression to the bottom surface of a substrate to support the substrate at the upper part of the body; wherein the vacuum assembly comprises: an vacuum pad with conductivity contacting the substrate; and a sealing member provided between the vacuum pad and the body, the sealing member electrically connected to the vacuum pad; wherein the sealing member is grounded.
    Type: Application
    Filed: October 28, 2021
    Publication date: May 5, 2022
    Applicant: SEMES CO., LTD.
    Inventors: Tae Hoon LEE, Ju Won KIM, Jin Sung SUN, Bo Hee LEE
  • Publication number: 20220130710
    Abstract: An apparatus for treating a substrate includes a transfer part, a first transfer robot and a second transfer robot disposed in a longitudinal direction of the transfer part, a liquid treating part disposed at one side of the transfer part to apply a liquid onto the substrate by supplying the liquid to the substrate, and a heat treating part disposed at an opposite side of the transfer part to face a first process treating part, to perform heat-treatment with respect to the substrate. The heat treating part includes a cooling transfer module to transfer the substrate between the first transfer robot and the second transfer robot and to cool the substrate.
    Type: Application
    Filed: October 28, 2021
    Publication date: April 28, 2022
    Inventors: KIWON HAN, TAE KYUNG KONG, JIN SUNG SUN
  • Publication number: 20210111062
    Abstract: An apparatus for transporting a substrate includes an actuator, a robot arm, operation of which is controlled by the actuator, a robot hand including at least one intake vent having a predetermined separation distance from the supported substrate, a fixing unit that fixes the substrate supported on the robot hand, and an intake unit connected with the intake vent.
    Type: Application
    Filed: October 8, 2020
    Publication date: April 15, 2021
    Applicant: SEMES CO., LTD.
    Inventors: Tae Kyung KONG, Kiwon HAN, Jin Sung SUN
  • Publication number: 20210028030
    Abstract: An apparatus for transferring a substrate is provided. A unit for transferring a substrate, includes a support structure, a first hand to place the substrate, a second hand stacked with the first hand and placing the substrate, a first guide rail guiding movement of a first support rod to support the first hand in the support structure, a second guide rail guiding movement of a second support rod in the support structure to support the second hand, and a pressure reducing member reducing pressure of an exhaust fluid passage provided in the support structure. The exhaust fluid passage includes a first fluid passage communicating with the first guide rail, a second fluid passage communicating with the second guide rail, and a third fluid passage formed by combining the first fluid passage with the second fluid passage. The pressure reducing member reduces pressure of the third fluid passage.
    Type: Application
    Filed: July 22, 2020
    Publication date: January 28, 2021
    Inventors: Tae Kyung KONG, Jin Sung SUN, Kiwon HAN