Patents by Inventor Jin Tac Kim

Jin Tac Kim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • WAFER CLEANING APPARATUS AND WAFER CLEANING METHOD USING THE SAME
    Publication number: 20120152276
    Abstract: The object of the present invention is to provide a wafer cleaning apparatus that reduces the amount of dissolved oxygen, without using hydrogen peroxide, to be able to reduce the deformation, etc. of a wafer and to reduce silicon consumption and a wafer cleaning method using the same.
    Type: Application
    Filed: December 3, 2009
    Publication date: June 21, 2012
    Inventors: Robert Henry Pagliaro, Sung Ho Hong, Jin Tac Kim, Deok Ho Kim