Patents by Inventor Jin Yeol Wang

Jin Yeol Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR MANUFACTURING ELECTROSTATIC CHUCK
    Publication number: 20250098036
    Abstract: The present invention relates to a method for manufacturing an electrostatic chuck, and more specifically, to a method for manufacturing an electrostatic chuck with minimized temperature deviation. The method of the present invention includes: a step S10 of forming a metal layer by depositing metal on a lower portion of a base containing a ceramic material and provided with an ESC electrode at an upper portion thereof; and a step S20 of forming a heater electrode by forming a pattern on the metal layer using a photolithography process.
    Type: Application
    Filed: January 31, 2024
    Publication date: March 20, 2025
    Inventors: Yun Hwi Park, Jin Yeol Wang, Yong Seok Choi, Ji Ho Uh, Seung Min Ryu, Do Youn Kim, Yoon Ho Jung