Abstract: The present invention concerns an image conversion module (09) that comprises an optical interface (10) for establishing an optical path (07). The image conversion module (09) further comprises a beam splitting element (13) on the optical path (07). The beam splitting element (13) is configured for splitting a beam entering the optical interface (10, 11) on the optical path (07) into a first optical subpath (14) and a second optical subpath (16). The image conversion module (09) further comprises a microelectromechanical optical system (17) that is configured for enhancing a depth of field on the first optical subpath (14) that is directed to a first optoelectronic submodule (21). The image conversion module (09) further comprises a second optoelectronic submodule (24) having an electronic sensor (26) on the second optical subpath (16). The second optoelectronic submodule (24) is configured for acquiring additional data on the sample (02).

Abstract: The invention concerns a method for capturing and displaying microscopic images of a sample to be microscopically examined using a digital microscope. In a step, a sequence of microscopic images with enhanced visual information in a third geometric dimension is captured. The sequence of the microscopic images is displayed while it is captured. A visual representation of a capturing range in the third geometric dimension is displayed at a graphical user interface. A user input that defines at least one adjustment of the capturing range is received resulting in an adjusted capturing range. At least one parameter of detecting visual information in the third geometric dimension is adjusted according to the adjusted capturing range. It is continued to capture the sequence of the microscopic images with the enhanced visual information in the third geometric dimension applying the at least one adjusted parameter. Furthermore, the invention concerns a digital microscope.

Abstract: The present invention concerns a method for producing a microscopic image with an extended depth of field by means of a microscope. The microscope comprises an images sensor that comprises pixels that are arranged as a matrix that is formed by lines. In a step of the method, a plurality of microscopic frames of a specimen is acquired while a focus position (z) is changed. The microscopic frames are acquired line by line. The focus position (z) is changed over a course of acquiring individuals of the microscopic frames. In a further step, parts of individuals of the acquired lines are identified. These parts sharply image the specimen. The identified parts of the lines are composed in order to form a microscopic image of the specimen with an extended depth of field. Furthermore, the present invention concerns a microscope.

Abstract: The invention concerns a digital microscope for capturing images of a sample with an extended depth of field. The microscope comprises a stand (01) with an opening (16) for receiving an optical unit (07). The microscope further comprises an optical unit (07) with an objective (08), an image sensor, and a microelectromechanical optical system on an optical path from the objective (08) to the image sensor. The microelectromechanical optical system is configured for extending a depth of field at the optical path. According to the invention, the imaging unit (07) comprises a mounting unit (13) comprising a first portion (14) for removable mounting the mounting unit (13) into the opening (16) of the stand (01), a second portion (18) for removable mounting an illumination unit (17) onto the mounting unit (13), and a third portion (21) for removable mounting an additional lens (19) onto the mounting unit (13) into an optical axis (22) of the objective (08). Furthermore, the invention concerns a microscopic set.

Abstract: The present invention concerns an image conversion module (09) that comprises an optical interface (10) for establishing an optical path (07). The image conversion module (09) further comprises a beam splitting element (13) on the optical path (07). The beam splitting element (13) is configured for splitting a beam entering the optical interface (10) on the optical path (07) into a first optical subpath (14) and a second optical subpath (16). The image conversion module (09) further comprises a microelectromechanical optical system (17) that is configured for enhancing a depth of field on the first optical subpath (14) that is directed to a first optoelectronic submodule (21), which comprises an image sensor (22). The image conversion module (09) further comprises a second optoelectronic submodule (24) that comprises an electronic sensor (26) on the second optical subpath (16). The second optoelectronic submodule (24) is configured for acquiring additional data on the sample (02).

Abstract: The invention concerns a functional module (02) for a microscope. That functional module (02) comprises a mechanical interface (11) for removable mounting the functional module (02) to a module support of the microscope. The functional module (02) further comprises an optical interface (12) for establishing an optical path (09) from an objective (03) of the microscope to the functional module (02). Furthermore, the functional module (02) comprises at least one image sensor (21). The functional module (02) comprises a first and a second microelectromechanical optical system (17, 18). The first microelectromechanical optical system (17) is configured for enhancing a depth of field on a first optical subpath (14) that is directed to the image sensor (21). The second microelectromechanical optical system (18) is configured for enhancing a depth of field on a second optical subpath (16) that is directed to the image sensor (21). The invention further concerns a microscope.

Abstract: The present invention comprises focus controlled illumination and variable focus optical element. With focus controlled illumination, contrast of the image improves. While reconstructing the three dimensional image with taken data, contrast of the image is very important. Also the contrast of the images is important for the quality of the images. By using focus controlled illumination, surfaces without texture, mirror-like surface, inclined surface can be imaged with this technique and apparatus.

Abstract: The present invention comprises a line scan camera and a variable focus optical element. With the line scan camera, the three dimensional imaging system of the present invention can overcome the speed problems of the area sensor and the variable focus optical element (Micromirror Array Lens) can change depth as fast as the line scan camera refreshes for the next scan so that the line scan camera and the variable focus optical element can be coupled to control optical depth and the linear scan. With help of the present invention scheme, three dimensional scan can be achieved with only one path scan of the line scan. Scheme, apparatus, and method are disclosed in the present invention.

Abstract: The present invention utilizes aperture array element and vari-focus optical element in confocal microscopy system. With the aperture array element lateral scanning property can be obtained and with vari-focus optical element axial scanning property can be obtained. Especially Micromirror Array Lens is used as a vari-focus optical element, fast and extended depth of focus scan range can be obtained. Thus the present invention of confocal microscopy with the vari-focus optical element increases scan speed of confocal microscopy system. The confocal microscopy system of the present invention comprises an illumination source, an aperture array element, a vari-focus optical element, an objective lens element, a photosensitive optical sensor device. With these elements, confocal microscopy is performed to get three dimensional images.

Abstract: A MEMS (micro electro mechanical system) actuator with discretely controlled multiple motions comprises bottom layer, stepper plate, support, and motion plate. The multiple motion of the motion plate is generated by the electrostatically actuated stepper plates and geometrically predetermined supports. By introducing the MEMS actuator with discretely controlled multiple motions, simple motion control can be achieved by digital controlling and only single voltage is needed for motion control of the motion plate.

Abstract: Various embodiments may be used for laser-based modification of target material of a workpiece while advantageously achieving improvements in processing throughput and/or quality. Embodiments of a method of processing may include focusing and directing laser pulses to a region of the workpiece at a pulse width sufficiently short so that material is efficiently removed by nonlinear optical absorption from the region and a quantity of heat affected zone and thermal stress on the material within the region, proximate to the region, or both is reduced relative to a quantity obtainable using a laser with longer pulses. In at least one embodiment, an ultrashort pulse laser system may include at least one of a fiber amplifier or fiber laser. Various embodiments are suitable for at least one of dicing, cutting, scribing, and forming features on or within a composite material.

Abstract: The binoculars of the present invention comprise two optical units; one optical unit for each eye. Each optical unit comprises a first reflector element and a second reflector element, wherein at least one of the reflector elements is a micromirror array reflector. The binoculars of the present invention provide focusing and/or zoom functions without or with minimal macroscopic mechanical lens movement.

Abstract: A Micromirror Array Lens with self-tilted micromirrors comprising a plurality of self-tilted micromirrors and configured to form a designed optical surface profile by self-tilted micromirrors. Each self-tilted micromirror comprises a substrate, at least one stiction plate configured to be attracted to the substrate by adhesion force, a micromirror plate having a reflective surface, coupled to the stiction plate elastically and configured to have a required motion when the stiction plate is attracted to the substrate, and at least one pivot structure disposed between the substrate and the micromirror plate and configured to provide a tilting point or area for the motion of the micromirror plate. The designed optical surface profile determines the required motion of the micromirror plate and a surface profile shape memory is built in the structure of the micro-mechanical elements of the self-tilted micromirrors so that each micromirror plate has the required motion.

Abstract: Various embodiments may be used for laser-based modification of target material of a workpiece while advantageously achieving improvements in processing throughput and/or quality. Embodiments of a method of processing may include focusing and directing laser pulses to a region of the workpiece at a pulse width sufficiently short so that material is efficiently removed by nonlinear optical absorption from the region and a quantity of heat affected zone and thermal stress on the material within the region, proximate to the region, or both is reduced relative to a quantity obtainable using a laser with longer pulses. In at least one embodiment, an ultrashort pulse laser system may include at least one of a fiber amplifier or fiber laser. Various embodiments are suitable for at least one of dicing, cutting, scribing, and forming features on or within a composite material.

Abstract: The present invention provides a Micromirror Array Lens (MMAL) with fixed focal length to reproduce a designed surface having optical focusing power. The micro mechanical structures with surface profile shape memory are fabricated and released after fabrication. Each micromirror in the MMAL has its own motion by stiction force and/or electrostatic force while and/or after the releasing process. Once the designed surface is formed, the MMAL has an optical power as a lens.

Abstract: A new three-dimensional imaging system has been needed to overcome the problems of the prior arts using conventional variable focal length lenses, which have slow response time, small focal length variation, and low focusing efficiency, and require a complex mechanism to control it. The three-dimensional imaging system of the present invention uses the variable focal length micromirror array lens. Since the micromirror array lens has many advantages such as very fast response time, large focal length variation, high optical focusing efficiency, large size aperture, low cost, simple mechanism, and so on, the three-dimensional imaging system can get a real-time three-dimensional image with large depth range and high depth resolution.

Abstract: A self-tilted micromirror device of the present invention comprises a plurality of micro-structures including a substrate, at least one stiction plate configured to be attracted to the substrate by adhesion force, a top plate coupled to the stiction plate elastically and configured to have at least one motion when the stiction plate is attracted to the substrate, and at least one pivot structure disposed between the substrate and the top plate and configured to provide a tilting point or area for the motion of the top plate. The motion of the top plate is determined by the geometry of the micro-structures of the self-tilted micromirror device.

Abstract: A Micromirror Array Lens with self-tilted micromirrors comprising a plurality of self-tilted micromirrors and configured to form a designed optical surface profile by self-tilted micromirrors. Each self-tilted micromirror comprises a substrate, at least one stiction plate configured to be attracted to the substrate by adhesion force, a micromirror plate having a reflective surface, coupled to the stiction plate elastically and configured to have a required motion when the stiction plate is attracted to the substrate, and at least one pivot structure disposed between the substrate and the micromirror plate and configured to provide a tilting point or area for the motion of the micromirror plate. The designed optical surface profile determines the required motion of the micromirror plate and a surface profile shape memory is built in the structure of the micro-mechanical elements of the self-tilted micromirrors so that each micromirror plate has the required motion.

Abstract: A Micromirror Array Lens comprises a plurality of micromirrors arranged on a flat or a curved surface to reflect incident light. Each micromirror in the Micromirror Array Lens is configured to have at least one motion. The Micromirror Array Lens forms at least one optical surface profile reproducing free surfaces by using the motions of the micromirrors. The free surface can be any two or three-dimensional continuous or discrete reflective surface. The Micromirror Array Lens having the corresponding optical surface profile provides optical focusing properties substantially identical to those of the free surface. The Micromirror Array Lens can forms various optical elements such as a variable focal length lens, a fixed focal length lens, an array of optical switches, a beam steerer, a zone plate, a shutter, an iris, a multiple focal length lens, other multi-function optical elements, and so on.

Abstract: A compact image taking lens system with a lens-surfaced prism of the present invention comprises a prism, an aperture stop, a first lens element, a second lens element, reflecting mirror surface, and image surface, optionally an infrared cut-off filter. By introducing a lens-surfaced prism, the compact image taking lens system with a lens-surfaced prism of the present invention has many advantages over the prior arts in the field of invention, such as compactness in thickness, small number of optical elements, high performance of optical quality, enough space for optional elements such as an infrared cut-off filter and diversity in optical geometries.