Abstract: An apparatus for attenuating vibration of a support structure for supporting a movable module that is drivable to move on the support structure. The support structure is isolated from a base by a resilient vibration isolator. The apparatus includes a force compensation system coupled to the support structure for applying one or more first vibration suppression forces on the support structure for at least partially canceling a reaction force exerted by the movable module when the movable module is driven to move on the support structure, and a sensing system attached to the support structure for measuring a vibration parameter of the support structure, wherein the force compensation system is further configured to apply at least one second vibration suppression force on the support structure according to the measured vibration parameter for attenuating vibration of the support structure.

Abstract: An active vibration absorber is attachable to a structure incorporating a positioning system which serves to vibrate the structure during its operation. The active vibration absorber comprises a mounting portion for attachment to the structure, an inertial mass that is resiliently coupled to the mounting portion and a force actuator which is operative to controllably move the inertial mass relative to the mounting portion. The force actuator is configured to move the inertial mass relative to the mounting body according to a motion profile during a motion cycle of the positioning system in order to attenuate vibrations in the structure. The motion profile is determined from a motion command which is operative to drive the positioning system during the motion cycle.

Abstract: An active vibration absorber is attachable to a structure incorporating a positioning system which serves to vibrate the structure during its operation. The active vibration absorber comprises a mounting portion for attachment to the structure, an inertial mass that is resiliently coupled to the mounting portion and a force actuator which is operative to controllably move the inertial mass relative to the mounting portion. The force actuator is configured to move the inertial mass relative to the mounting body according to a motion profile during a motion cycle of the positioning system in order to attenuate vibrations in the structure. The motion profile is determined from a motion command which is operative to drive the positioning system during the motion cycle.