Abstract: A laser interference photolithography system, comprising a laser device, a first reflector, a grating beam-splitter, a second reflector, a first universal reflector, a first lens, a second universal reflector, a second lens, a beam splitting prism, a control module, an angle measurement module, a third lens and a substrate. The control module comprises a signal processing terminal, a controller, and a driver. The signal processing terminal is connected to the angle measurement module, the controller is connected to both the signal processing terminal and the driver, and the driver is connected to both the first universal reflector and the second universal reflector. The laser emits a laser light that is split into two beams of light by the system, and the two beams of light are focused on the substrate for exposure.

Abstract: A split-type aerostatic bearing for supporting a moving table to move frictionlessly on a platform (4) is disclosed. The split-type aerostatic bearing includes an aerostatic bearing plate (6), air floating elements (2?a, 2?b, 2?c, 2?d) disposed on a bottom of the aerostatic bearing plate (6) and a vacuum pre-tightening structure (7) disposed on the aerostatic bearing plate (6). The vacuum pre-tightening structure (7) is coupled to the aerostatic bearing plate (6) in a split fashion. Separation of the air floating elements (2?a, 2?b, 2?c, 2?d) from the vacuum pre-tightening structure (7) prevents the aerostatic bearing plate (6) from bending under a vacuum pre-tightening force, and hence will not affect the air floating area.

Abstract: A split-type aerostatic bearing for supporting a moving table to move frictionlessly on a platform (4) is disclosed. The split-type aerostatic bearing includes an aerostatic bearing plate (6), air floating elements (2?a, 2?b, 2?c, 2?d) disposed on a bottom of the aerostatic bearing plate (6) and a vacuum pre-tightening structure (7) disposed on the aerostatic bearing plate (6). The vacuum pre-tightening structure (7) is coupled to the aerostatic bearing plate (6) in a split fashion. Separation of the air floating elements (2?a, 2?b, 2?c, 2?d) from the vacuum pre-tightening structure (7) prevents the aerostatic bearing plate (6) from bending under a vacuum pre-tightening force, and hence will not affect the air floating area.