Patents by Inventor Jinchun Li

Jinchun Li has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Split type aerostatic bearing
    Patent number: 8920031
    Abstract: A split-type aerostatic bearing for supporting a moving table to move frictionlessly on a platform (4) is disclosed. The split-type aerostatic bearing includes an aerostatic bearing plate (6), air floating elements (2?a, 2?b, 2?c, 2?d) disposed on a bottom of the aerostatic bearing plate (6) and a vacuum pre-tightening structure (7) disposed on the aerostatic bearing plate (6). The vacuum pre-tightening structure (7) is coupled to the aerostatic bearing plate (6) in a split fashion. Separation of the air floating elements (2?a, 2?b, 2?c, 2?d) from the vacuum pre-tightening structure (7) prevents the aerostatic bearing plate (6) from bending under a vacuum pre-tightening force, and hence will not affect the air floating area.
    Type: Grant
    Filed: February 13, 2012
    Date of Patent: December 30, 2014
    Assignee: Shanghai Micro Electronics Equipment Co., Ltd.
    Inventors: Jinchun Li, Jie Fang, Yeqin Zheng, Hai Xia, Liwei Wu
  • SPLIT TYPE AEROSTATIC BEARING
    Publication number: 20140016886
    Abstract: A split-type aerostatic bearing for supporting a moving table to move frictionlessly on a platform (4) is disclosed. The split-type aerostatic bearing includes an aerostatic bearing plate (6), air floating elements (2?a, 2?b, 2?c, 2?d) disposed on a bottom of the aerostatic bearing plate (6) and a vacuum pre-tightening structure (7) disposed on the aerostatic bearing plate (6). The vacuum pre-tightening structure (7) is coupled to the aerostatic bearing plate (6) in a split fashion. Separation of the air floating elements (2?a, 2?b, 2?c, 2?d) from the vacuum pre-tightening structure (7) prevents the aerostatic bearing plate (6) from bending under a vacuum pre-tightening force, and hence will not affect the air floating area.
    Type: Application
    Filed: February 13, 2012
    Publication date: January 16, 2014
    Applicant: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.
    Inventors: Jinchun Li, Jie Fang, Yeqin Zheng, Hai Xia, Liwei Wu