Abstract: A semiconductor substrate having a first active region and a second active region for fabricating a first transistor and a second transistor is provided. A first gate structure and a second gate structure are formed on the first active region and the second active region and a first spacer is formed surrounding the first gate structure and the second gate structure. A source/drain region for the first transistor and the second transistor is formed. The first spacer is removed from the first gate structure and the second gate structure and a cap layer is disposed on the first transistor and the second transistor and the cap layer covering the second transistor is removed thereafter. An etching process is performed to form a recess in the substrate surrounding the second gate structure. An epitaxial layer is formed in the recess and the cap layer is removed from the first transistor.

Abstract: A semiconductor device includes a substrate defining an active area thereon, a shallow trench isolation on the substrate and directly surrounding the active area, a gate, a source and a drain on the active area and a hard mask on the border of the shallow trench isolation and the active area.

Abstract: A semiconductor structure is disclosed, including a substrate having therein a first well of a first conductivity type and a second well of a second conductivity type, a first MOS transistor of the first conductivity type and a second MOS transistor of the second conductivity type. The first MOS transistor is disposed on the second well, including a gate structure on the second well and a strained layer of the first conductivity type in an opening in the second well beside the gate structure. The difference between the cell parameter of a portion of the strained layer near the bottom of the opening and that of the substrate is less than the difference between the cell parameter of a portion of the strained layer apart from the bottom of the opening and that of the substrate. The second MOS transistor is disposed on the first well.

Abstract: A semiconductor structure is disclosed, including a substrate having therein a first well of a first conductivity type and a second well of a second conductivity type, a first MOS transistor of the first conductivity type and a second MOS transistor of the second conductivity type. The first MOS transistor is disposed on the second well, including a gate structure on the second well and a strained layer of the first conductivity type in an opening in the second well beside the gate structure. The difference between the lattice parameter of a portion of the strained layer near the bottom of the opening and that of the substrate is less than the difference between the lattice parameter of a portion of the strained layer apart from the bottom of the opening and that of the substrate. The second MOS transistor is disposed on the first well.

Abstract: A semiconductor structure is disclosed, including a substrate having therein a first well of a first conductivity type and a second well of a second conductivity type, a first MOS transistor of the first conductivity type and a second MOS transistor of the second conductivity type. The first MOS transistor is disposed on the second well, including a gate structure on the second well and a strained layer of the first conductivity type in an opening in the second well beside the gate structure. The difference between the cell parameter of a portion of the strained layer near the bottom of the opening and that of the substrate is less than the difference between the cell parameter of a portion of the strained layer apart from the bottom of the opening and that of the substrate. The second MOS transistor is disposed on the first well.

Abstract: A semiconductor structure is disclosed, including a substrate having therein a first well of a first conductivity type and a second well of a second conductivity type, a first MOS transistor of the first conductivity type and a second MOS transistor of the second conductivity type. The first MOS transistor is disposed on the second well, including a gate structure on the second well and a strained layer of the first conductivity type in an opening in the second well beside the gate structure. The difference between the cell parameter of a portion of the strained layer near the bottom of the opening and that of the substrate is less than the difference between the cell parameter of a portion of the strained layer apart from the bottom of the opening and that of the substrate. The second MOS transistor is disposed on the first well.

Abstract: A semiconductor substrate having a first active region and a second active region for fabricating a first transistor and a second transistor is provided. A first gate structure and a second gate structure are formed on the first active region and the second active region and a first spacer is formed surrounding the first gate structure and the second gate structure. A source/drain region for the first transistor and the second transistor is formed. The first spacer is removed from the first gate structure and the second gate structure and a cap layer is disposed on the first transistor and the second transistor and the cap layer covering the second transistor is removed thereafter. An etching process is performed to form a recess in the substrate surrounding the second gate structure. An epitaxial layer is formed in the recess and the cap layer is removed from the first transistor.