Patents by Inventor Jing-Yi Lin

Jing-Yi Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11937416
    Abstract: A substrate includes a first doped region having a first type dopant, and a second doped region having a second type dopant and adjacent to the first doped region. A stack is formed that includes first layers and second layers alternating with each other. The first and second layers each have a first and second semiconductor material, respectively. The second semiconductor material is different than the first semiconductor material. A mask element is formed that has an opening in a channel region over the second doped region. A top portion of the stack not covered by the mask element is recessed. The stack is then processed to form a first and a second transistors. The first transistor has a first number of first layers. The second transistor has a second number of first layers. The first number is greater than the second number.
    Type: Grant
    Filed: May 23, 2022
    Date of Patent: March 19, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Shih-Hao Lin, Kian-Long Lim, Chih-Chuan Yang, Chia-Hao Pao, Jing-Yi Lin
  • Patent number: 11908910
    Abstract: Methods and devices that provide a first fin structure, a second fin structure, and a third fin structure disposed over a substrate. A dielectric fin is formed between the first fin structure and the second fin structure, and a conductive line is formed between the second fin structure and the third fin structure.
    Type: Grant
    Filed: October 27, 2020
    Date of Patent: February 20, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chih-Chuan Yang, Jing-Yi Lin, Hsin-Wen Su, Shih-Hao Lin
  • Publication number: 20230369143
    Abstract: A test structure on a wafer is provided. The test structure includes a plurality of cells under test, a first output pad and a second output pad coupled to different cells, a plurality of first input pads, and a plurality of second input pads. The cells are arranged in rows and columns of a test array. Each of the first input pads is coupled to the cells in respective column of the test array. Each of the second input pads is coupled to the cells in respective row of the test array. A first voltage is applied to one of the first input pads and a second voltage is applied to one of the second input pads to turn on a cell, and a current flowing through the turned-on cell is measured.
    Type: Application
    Filed: June 28, 2023
    Publication date: November 16, 2023
    Inventors: Jing-Yi LIN, Chih-Chuan YANG, Kuo-Hsiu HSU, Lien-Jung HUNG
  • Patent number: 11728227
    Abstract: Test structures on a wafer are provided. A plurality of cells are arranged in rows and columns of a test array. First and second output pads are formed on opposite sides of the test array. A first output pad is coupled to the cells in one half of the rows of the test array. A second output pad is coupled to the cells in the other half of the rows of the test array. Each first input pad is coupled to the cells in respective column of the test array. Each second input pad is coupled to the cells in respective row of the test array. When a first voltage is applied to one of the first input pads and a second voltage is applied to one of the second input pads, current flowing through the turned-on cell is measured through the first or second output pad.
    Type: Grant
    Filed: May 13, 2022
    Date of Patent: August 15, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jing-Yi Lin, Chih-Chuan Yang, Kuo-Hsiu Hsu, Lien-Jung Hung
  • Publication number: 20230225098
    Abstract: A method includes forming a first fin protruding from a substrate in a first region of the substrate and a second fin protruding from the substrate in a second region of the substrate, recessing a portion of the first fin, thereby forming a first recess, recessing a portion of the second fin, thereby forming a second recess, depositing a blocking layer in the second recess, growing a base epitaxial layer in the first recess, removing the blocking layer from the second recess, and growing a doped epitaxial layer in the first recess and the second recess. The base epitaxial layer is dopant free. The doped epitaxial layer abuts the first fin in the first region and the second fin in the second region.
    Type: Application
    Filed: June 4, 2022
    Publication date: July 13, 2023
    Inventors: Chih-Chuan Yang, Wen-Chun Keng, Shih-Hao Lin, Hsin-Wen Su, Yu-Kuan Lin, Ping-Wei Wang, Jing-Yi Lin
  • Publication number: 20230067988
    Abstract: A semiconductor structure includes a stack of semiconductor layers disposed over a protruding portion of a substrate, isolation features disposed over the substrate, wherein a top surface of the protruding portion of the substrate is separated from a bottom surface of the isolation features by a first distance, a metal gate stack interleaved with the stack of semiconductor layers, where a bottom portion of the metal gate stack is disposed on sidewalls of the protruding portion of the substrate and where thickness of the bottom portion of the metal gate stack is defined by a second distance that is less than the first distance, and epitaxial source/drain features disposed adjacent to the metal gate stack.
    Type: Application
    Filed: August 30, 2021
    Publication date: March 2, 2023
    Inventors: Shih-Hao Lin, Chih-Chuan Yang, Hsin-Wen Su, Jing-Yi Lin, Shang-Rong Li, Chong-De Lien
  • Publication number: 20220310599
    Abstract: Various embodiments of the present disclosure are directed towards a method for forming an integrated chip. The method includes forming an epitaxial structure having a first doping type over a first portion of a semiconductor substrate. A second portion of the semiconductor substrate is formed over the epitaxial structure and the first portion of the semiconductor substrate. A first doped region having the first doping type is formed in the second portion of the semiconductor substrate and directly over the epitaxial structure. A second doped region having a second doping type opposite the first doping type is formed in the second portion of the semiconductor substrate, where the second doped region is formed on a side of the epitaxial structure. A plurality of fins of the semiconductor substrate are formed by selectively removing portions of the second portion of the semiconductor substrate.
    Type: Application
    Filed: June 15, 2022
    Publication date: September 29, 2022
    Inventors: Jing-Yi Lin, Chih-Chuan Yang, Shih-Hao Lin
  • Publication number: 20220285369
    Abstract: A substrate includes a first doped region having a first type dopant, and a second doped region having a second type dopant and adjacent to the first doped region. A stack is formed that includes first layers and second layers alternating with each other. The first and second layers each have a first and second semiconductor material, respectively. The second semiconductor material is different than the first semiconductor material. A mask element is formed that has an opening in a channel region over the second doped region. A top portion of the stack not covered by the mask element is recessed. The stack is then processed to form a first and a second transistors. The first transistor has a first number of first layers. The second transistor has a second number of first layers. The first number is greater than the second number.
    Type: Application
    Filed: May 23, 2022
    Publication date: September 8, 2022
    Inventors: Shih-Hao Lin, Kian-Long Lim, Chih-Chuan Yang, Chia-Hao Pao, Jing-Yi Lin
  • Patent number: 11430788
    Abstract: Various embodiments of the present disclosure are directed towards a method for forming an integrated chip. The method includes forming an epitaxial structure having a first doping type over a first portion of a semiconductor substrate. A second portion of the semiconductor substrate is formed over the epitaxial structure and the first portion of the semiconductor substrate. A first doped region having the first doping type is formed in the second portion of the semiconductor substrate and directly over the epitaxial structure. A second doped region having a second doping type opposite the first doping type is formed in the second portion of the semiconductor substrate, where the second doped region is formed on a side of the epitaxial structure. A plurality of fins of the semiconductor substrate are formed by selectively removing portions of the second portion of the semiconductor substrate.
    Type: Grant
    Filed: February 24, 2020
    Date of Patent: August 30, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jing-Yi Lin, Chih-Chuan Yang, Shih-Hao Lin
  • Patent number: 11342338
    Abstract: A substrate includes a first doped region having a first type dopant, and a second doped region having a second type dopant and adjacent to the first doped region. A stack is formed that includes first layers and second layers alternating with each other. The first and second layers each have a first and second semiconductor material, respectively. The second semiconductor material is different than the first semiconductor material. A mask element is formed that has an opening in a channel region over the second doped region. A top portion of the stack not covered by the mask element is recessed. The stack is then processed to form a first and a second transistors. The first transistor has a first number of first layers. The second transistor has a second number of first layers. The first number is greater than the second number.
    Type: Grant
    Filed: September 1, 2020
    Date of Patent: May 24, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shih-Hao Lin, Kian-Long Lim, Chih-Chuan Yang, Chia-Hao Pao, Jing-Yi Lin
  • Publication number: 20220130971
    Abstract: Methods and devices that provide a first fin structure, a second fin structure, and a third fin structure disposed over a substrate. A dielectric fin is formed between the first fin structure and the second fin structure, and a conductive line is formed between the second fin structure and the third fin structure.
    Type: Application
    Filed: October 27, 2020
    Publication date: April 28, 2022
    Inventors: Chih-Chuan Yang, Jing-Yi Lin, Hsin-Wen Su, Shih-Hao Lin
  • Publication number: 20210265346
    Abstract: Various embodiments of the present disclosure are directed towards a method for forming an integrated chip. The method includes forming an epitaxial structure having a first doping type over a first portion of a semiconductor substrate. A second portion of the semiconductor substrate is formed over the epitaxial structure and the first portion of the semiconductor substrate. A first doped region having the first doping type is formed in the second portion of the semiconductor substrate and directly over the epitaxial structure. A second doped region having a second doping type opposite the first doping type is formed in the second portion of the semiconductor substrate, where the second doped region is formed on a side of the epitaxial structure. A plurality of fins of the semiconductor substrate are formed by selectively removing portions of the second portion of the semiconductor substrate.
    Type: Application
    Filed: February 24, 2020
    Publication date: August 26, 2021
    Inventors: Jing-Yi Lin, Chih-Chuan Yang, Shih-Hao Lin
  • Publication number: 20210098473
    Abstract: A substrate includes a first doped region having a first type dopant, and a second doped region having a second type dopant and adjacent to the first doped region. A stack is formed that includes first layers and second layers alternating with each other. The first and second layers each have a first and second semiconductor material, respectively. The second semiconductor material is different than the first semiconductor material. A mask element is formed that has an opening in a channel region over the second doped region. A top portion of the stack not covered by the mask element is recessed. The stack is then processed to form a first and a second transistors. The first transistor has a first number of first layers. The second transistor has a second number of first layers. The first number is greater than the second number.
    Type: Application
    Filed: September 1, 2020
    Publication date: April 1, 2021
    Inventors: Shih-Hao Lin, Kian-Long Lim, Chih-Chuan Yang, Chia-Hao Pao, Jing-Yi Lin
  • Publication number: 20190371916
    Abstract: A semiconductor structure having a metal gate includes a dielectric layer. The dielectric layer having a recess is disposed on a substrate, wherein the dielectric layer has a top part and a bottom part, and the tensile stress of the top part is larger than the tensile stress of the bottom part, thereby the recess having a sidewall profile tapering from bottom to top. The present invention also provides a method of forming said semiconductor structure.
    Type: Application
    Filed: June 26, 2018
    Publication date: December 5, 2019
    Inventors: Jing-Yi Lin, Yi-Wen Chen, Hung-Yi Wu, Ping-Wei Huang, Shao-Wei Wang, Yueh-Chi Chuang, Hung-Jen Huang, Hao-Che Feng
  • Patent number: 8474914
    Abstract: An armrest adjustment device includes an armrest arranged at a top surface of an armrest support. The lower part of the armrest support is connected to a chair seat. The armrest can be adjusted to move forward and backward in relation to the chair seat. A first component is mounted in the armrest. The first component is assembled with and fixed on the armrest support so that the armrest can be moved forward and backward in relation to the first component. Moreover, a second component is arranged between the armrest and the armrest support. Instead of the first component, the second component is assembled with and fixed on the armrest support. Thus the armrest is moved in the left/right direction in relation to the second component.
    Type: Grant
    Filed: June 29, 2011
    Date of Patent: July 2, 2013
    Assignee: ATec International Team Co., Ltd.
    Inventors: Te-Chun Chen, Jing-Yi Lin
  • Publication number: 20120025584
    Abstract: An armrest adjustment device is revealed. The armrest adjustment device includes an armrest arranged at a top surface of an armrest support. The lower part of the armrest support is connected to a chair seat. The armrest can be adjusted to move forward and backward in relation to the chair seat. A first component is mounted in the armrest. The first component is assembled with and fixed on the armrest support so that the armrest can be moved forward and backward in relation to the first component. Moreover, a second component is arranged between the armrest and the armrest support. Instead of the first component, the second component is assembled with and fixed on the armrest support. Thus the armrest is moved in the left/right direction in relation to the second component.
    Type: Application
    Filed: June 29, 2011
    Publication date: February 2, 2012
    Inventors: Te-Chun CHEN, Jing-Yi Lin
  • Patent number: 7977254
    Abstract: A method of forming a gate insulator in the manufacture of a semiconductor device comprises conducting a photo-assisted electrochemical process to form a gate-insulating layer on a gallium nitride layer of the semiconductor device, wherein the gate-insulating layer includes gallium oxynitride and gallium oxide, and performing a rapid thermal annealing process. The photo-assisted electrochemical process uses an electrolyte bath including buffered CH3COOH at a pH between about 5.5 and 7.5. The rapid thermal annealing process is conducted in O2 environment at a temperature between about 500° C. and 800° C.
    Type: Grant
    Filed: June 27, 2007
    Date of Patent: July 12, 2011
    Assignee: Tekcore Co., Ltd.
    Inventors: Lung-Han Peng, Han-Ming Wu, Jing-Yi Lin
  • Publication number: 20110124203
    Abstract: A method of forming a gate insulator in the manufacture of a semiconductor device comprises conducting a photo-assisted electrochemical process to form a gate-insulating layer on a gallium nitride layer of the semiconductor device, wherein the gate-insulating layer includes gallium oxynitride and gallium oxide, and performing a rapid thermal annealing process. The photo-assisted electrochemical process uses an electrolyte bath including buffered CH3COOH at a pH between about 5.5 and 7.5. The rapid thermal annealing process is conducted in O2 environment at a temperature between about 500° C. and 800° C.
    Type: Application
    Filed: June 27, 2007
    Publication date: May 26, 2011
    Inventors: Lung-Han Peng, Han-Ming Wu, Jing-Yi Lin
  • Patent number: 7253061
    Abstract: A method of forming a gate insulator in the manufacture of a semiconductor device comprises conducting a photo-assisted electrochemical process to form a gate-insulating layer on a gallium nitride layer of the semiconductor device, wherein the gate-insulating layer includes gallium oxynitride and gallium oxide, and performing a rapid thermal annealing process. The photo-assisted electrochemical process uses an electrolyte bath including buffered CH3COOH at a pH between about 5.5 and 7.5. The rapid thermal annealing process is conducted in O2 environment at a temperature between about 500° C. and 800° C.
    Type: Grant
    Filed: December 6, 2004
    Date of Patent: August 7, 2007
    Assignee: Tekcore Co., Ltd.
    Inventors: Lung-Han Peng, Han-Ming Wu, Jing-Yi Lin
  • Publication number: 20060121700
    Abstract: A method of forming a gate insulator in the manufacture of a semiconductor device comprises conducting a photo-assisted electrochemical process to form a gate-insulating layer on a gallium nitride layer of the semiconductor device, wherein the gate-insulating layer includes gallium oxynitride and gallium oxide, and performing a rapid thermal annealing process. The photo-assisted electrochemical process uses an electrolyte bath including buffered CH3COOH at a pH between about 5.5 and 7.5. The rapid thermal annealing process is conducted in O2 environment at a temperature between about 500° C. and 800° C.
    Type: Application
    Filed: December 6, 2004
    Publication date: June 8, 2006
    Inventors: Lung-Han Peng, Han-Ming Wu, Jing-Yi Lin