Patents by Inventor Jingran GU

Jingran GU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chemical mechanical planarization equipment, wafer transfer method, and wafer planarization unit
    Patent number: 12251785
    Abstract: A chemical-mechanical planarization equipment, comprising a polishing module, a cleaning module and a wafer transfer module, wherein the polishing module comprises two rows of polishing unit arrays, each row of polishing unit arrays comprises two or more sets of polishing units, polishing transfer stations corresponding to two rows of polishing unit arrays are longitudinally arranged and located in the row direction of the polishing unit arrays, and a working area of the wafer transfer module is located vertically above the longitudinally arranged polishing transfer stations.
    Type: Grant
    Filed: August 20, 2019
    Date of Patent: March 18, 2025
    Assignee: HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC.
    Inventors: EdwardLiCang Lee, Jingran Gu
  • CHEMICAL MECHANICAL PLANARIZATION EQUIPMENT, WAFER TRANSFER METHOD, AND WAFER PLANARIZATION UNIT
    Publication number: 20210260716
    Abstract: A chemical-mechanical planarization equipment, comprising a polishing module, a cleaning module and a wafer transfer module, wherein the polishing module comprises two rows of polishing unit arrays, each row of polishing unit arrays comprises two or more sets of polishing units, polishing transfer stations corresponding to two rows of polishing unit arrays are longitudinally arranged and located in the row direction of the polishing unit arrays, and a working area of the wafer transfer module is located vertically above the longitudinally arranged polishing transfer stations.
    Type: Application
    Filed: August 20, 2019
    Publication date: August 26, 2021
    Applicant: HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC.
    Inventors: EdwardLiCang LEE, Jingran GU