Abstract: Methods and systems for determining a layer on which a defect detected on a wafer is located are provided. One method includes detecting defects on a wafer by directing light to the wafer at first and second angles of incidence and determining locations of the defects on the wafer based on the output corresponding to the defects. For one of the defects detected in the output generated for one spot illuminated on the wafer with the light directed to the wafer at the first and second angles, the method includes comparing the locations of the one of the defects determined based on the output generated with the light directed to the one spot on the wafer at the first and second angles. The method further includes determining a layer of the wafer on which the one of the defects is located based on results of the comparing.

Abstract: Methods and systems for determining a layer on which a defect detected on a wafer is located are provided. One method includes detecting defects on a wafer by directing light to the wafer at first and second angles of incidence and determining locations of the defects on the wafer based on the output corresponding to the defects. For one of the defects detected in the output generated for one spot illuminated on the wafer with the light directed to the wafer at the first and second angles, the method includes comparing the locations of the one of the defects determined based on the output generated with the light directed to the one spot on the wafer at the first and second angles. The method further includes determining a layer of the wafer on which the one of the defects is located based on results of the comparing.

Abstract: A system and method for incorporating partially coherent illumination models into the problem of phase and amplitude retrieval from a stack of intensity images. The recovery of phase could be realized by many methods, including Kalman filters or other nonlinear optimization algorithms that provide least squares error between the measurement and estimation.

Abstract: A system and method for incorporating partially coherent illumination models into the problem of phase and amplitude retrieval from a stack of intensity images. The recovery of phase could be realized by many methods, including Kalman filters or other nonlinear optimization algorithms that provide least squares error between the measurement and estimation.

Abstract: An intensity image is collected at each of a plurality of locations spaced apart in a propagation direction of a light beam. Information from the intensity images is combined using a Kalman filter which assumes that at least one co-variance matrix has a diagonal form. This leads to considerable reduction in computational complexity. An augmented Kalman filter model (augmented space state model) is used in place of the standard Kalman filter model. The augmented Kalman filter improves the robustness to noise.