Abstract: An optical microscope system for 3D surface deformation and morphology measurement that can serve as a powerful tool in quality engineering and control, as well as in biological and materials research is described. The system was developed in part by combining the DAIC technique with optical microscopy. Decoding algorithms were derived for calculating the 3D displacement or profile of a micro-sized test sample from the in-plane displacement components of it first-order diffracted views.

Abstract: An electrically controllable azimuth optical rotator (10) includes a first quarterwave plate (16) for receiving a first beam of electromagnetic energy (22) having a first arbitrary polarization state, and outputting a second beam (122) in response to the first quarterwave plate (16). An electric voltage controlled ferro-electric variable phase retarder (20) aligned at approximately 45 degrees to the first quarterwave plate (16) receives the second beam 122 and provides a third beam 38 in response to the retarder (20). The electric voltage controlled ferro-electric variable phase retarder (20) is characterized by a phase shift of &phgr;=2&agr;, where &agr; is a desired angle of rotation of the first arbitrary polarization state. To provide a voltage-controlled rotation, a second quarterwave plate (18) is aligned either parallel or perpendicular to the first quarterwave plate (16) for receiving the third beam (38) and outputting a fourth beam (46) in response to the retarder (20).

Abstract: An electrically controllable azimuth optical rotator (10) includes a first quarterwave plate (16) for receiving a first beam of electromagnetic energy (22) having a first arbitrary polarization state, and outputting a second beam (122) in response to the first quarterwave plate (16). An electric voltage controlled ferro-electric variable phase retarder (20) aligned at approximately 45 degrees to the first quarterwave plate (16) receives the second beam 122 and provides a third beam 38 in response to the retarder (20). The electric voltage controlled ferro-electric variable phase retarder (20) is characterized by a phase shift of &phgr;=2&agr;, where &agr; is a desired angle of rotation of the first arbitrary polarization state. To provide a voltage-controlled rotation, a second quarterwave plate (18) is aligned either parallel or perpendicular to the first quarterwave plate (16) for receiving the third beam (38) and outputting a fourth beam (46) in response to the retarder (20).