Abstract: The present disclosure provides a coil device for generating plasma in semiconductor process equipment and the semiconductor process equipment. The device includes a coil structure and a fixed cooling assembly for fixing and cooling the coil structure. The fixed cooling assembly includes a fixed body made of insulation material. A cooling space is formed in the fixed body. The coil structure is fixedly arranged in the cooling space. An inlet opening and an outlet opening communicating with the cooling space are arranged at the fixed body. The inlet opening is configured to transfer the cooling gas into the cooling space. The outlet opening is configured to exhaust the cooling gas out of the cooling space. A turbulence structure is further arranged in the cooling space and is configured to change a gas flow direction in the cooling space to improve uniformity of the gas distribution in the cooling space.

Abstract: The present disclosure provides a coil structure for generating plasma and semiconductor processing equipment. The coil structure includes at least one coil set. The coil set includes a first sub-coil set and a second sub-coil set that are coaxially arranged. The first sub-coil set includes at least one first planar coil located in a first plane. The second sub-coil set includes at least one second planar coil located in a second plane parallel to the first plane. The first planar coil and the second planar coil are connected in series. An orthogonal projection of the second planar coil on the first plane is mirror-symmetric or mirror-asymmetric to the first planar coil.

Abstract: A carrier device is configured to carry a wafer in a semiconductor reaction chamber. The carrier device includes a chuck, a focus ring assembly, and a plurality of focus ring thimbles. The chuck is arranged in the semiconductor reaction chamber to support the wafer. The focus ring assembly includes a lower focus ring and an upper focus ring. The lower focus ring is arranged around the chuck. The lower focus ring includes a groove on an upper surface of the lower focus ring. A part of an upper surface of the lower focus ring located on an inner side of the groove is a support area. A first position-limiting member is arranged on a lower surface of the upper focus ring and corresponds to the groove. The plurality of focus ring thimbles are distributed along a circumference of the upper focus ring at intervals.

Abstract: A coil structure includes a coil set including a first coil and a second coil. The first coil and the second coil are wound to form an annular area. A first end of the first coil and a first end of the second coil are close to an inner ring of the annular area. A second end of the first coil and a second end of the second coil are close to an outer ring of the annular area. The first end of the first coil is electrically connected to the first end of the second coil. A first projection-of the first coil on a plane perpendicular to an axial direction of the coil structure and a second projection of the second coil on the plane are mirror-symmetrical to each other.

Abstract: A film forming composition comprises a film forming component and a solvent, wherein the film forming component comprises 0-50 wt % of a first water soluble polymer, 0.3-40 wt % of a second water soluble polymer, 0-15 wt % of plasticizer and 50-70 wt % of active ingredient. The first and second water soluble polymers have a Tg of ?52° C. to 216° C., and difference of Tg values of the first and second water soluble polymer is 62-268° C. The film formed by the film forming composition capable to load high content of active ingredient and lead to fast absorption of active ingredient is provided.

Abstract: A film forming composition comprises a film forming component and a solvent, wherein the film forming component comprises 0-50 wt % of a first water soluble polymer, 0.3-40 wt % of a second water soluble polymer, 0-15 wt % of plasticizer and 50-70 wt % of active ingredient. The first and second water soluble polymers have a Tg of ?52° C. to 216° C., and difference of Tg values of the first and second water soluble polymer is 62-268° C. The film formed by the film forming composition capable to load high content of active ingredient and lead to fast absorption of active ingredient is provided.

Abstract: The present invention relates to a nanoemulsion for transdermal delivery. The presently claimed invention provides chemical formulations for preparing a nanoemulsion, and the methods for preparing the nanoemulsion. The nanoemulsion has desirable particle size for efficient transdermal delivery, and doesn't involve any organic solvent which is harmful to human skin. The corresponding fabrication method is simple.

Abstract: The present invention provides a biodegradable microdepot delivery system for topical delivery of active ingredients through the skin surface of a subject. The configuration, dimension, and chemical composition of the microdepots allow a relatively short dissolution time of less than 5 minutes while insertion ratio of the microdepots can reach more than 60%, some of which can even reach about 97%, under exertion of a relatively low pressing force. The present invention also provides a method for fabricating the biodegradable microdepot delivery system and a polymeric solution for forming the same.

Abstract: The present invention relates to a method of preparing a solid form of soy isoflavone (e.g. genistein). In particular, the present invention relates to a method of preparing a solid form of soy isoflavone by precipitation with compressed antisolvent using a supercritical fluid to produce nano-sized particles of soy isoflavone with an improved dissolution rate and bioavailability. An oral composition or aerosolized formulation comprising the nanoparticles of the soy isoflavone prepared by the method of the present invention is also disclosed herein. The dissolution rate and bioavailability of the nanoparticles of the soy isoflavone prepared by the method of the present invention have a 2-fold increase and a 2.6-fold increase respectively as compared to those of the raw soy isoflavone.

Abstract: The present invention relates to a nanoemulsion for transdermal delivery. The presently claimed invention provides chemical formulations for preparing a nanoemulsion, and the methods for preparing the nanoemulsion. The nanoemulsion has desirable particle size for efficient transdermal delivery, and doesn't involve any organic solvent which is harmful to human skin. The corresponding fabrication method is simple.

Abstract: The present invention provides a biodegradable microdepot delivery system for topical delivery of active ingredients through the skin surface of a subject. The configuration, dimension, and chemical composition of the microdepots allow a relatively short dissolution time of less than 5 minutes while insertion ratio of the microdepots can reach more than 60%, some of which can even reach about 97%, under exertion of a relatively low pressing force. The present invention also provides a method for fabricating the biodegradable microdepot delivery system and a polymeric solution for forming the same.