Abstract: A temperature control device and a temperature control method are provided. The temperature control device is located at an interface between a photoresist coating and developing machine and a lithography machine and includes: a temperature detection device, a gas flow generator and a controller. The temperature detection device and the gas flow generator are respectively connected to the controller. The temperature detection device is configured to detect an actual temperature at the interface in real time. The gas flow generator is at least configured to generate a gas flow sealing knife around the interface. The controller is configured to control the gas flow generator to generate the gas flow sealing knife responsive to that the actual temperature detected by the temperature detection device is not equal to the target temperature, to control the actual temperature at the interface to reach the target temperature through the gas flow sealing knife.

Abstract: A temperature control device and a temperature control method are provided. The temperature control device is located at an interface between a photoresist coating and developing machine and a lithography machine and includes: a temperature detection device, a gas flow generator and a controller. The temperature detection device and the gas flow generator are respectively connected to the controller. The temperature detection device is configured to detect an actual temperature at the interface in real time. The gas flow generator is at least configured to generate a gas flow sealing knife around the interface. The controller is configured to control the gas flow generator to generate the gas flow sealing knife responsive to that the actual temperature detected by the temperature detection device is not equal to the target temperature, to control the actual temperature at the interface to reach the target temperature through the gas flow sealing knife.

Abstract: The method includes: providing a substrate, the substrate including a first region and a second region; forming an insulating layer on the substrate; etching a portion of the insulating layer in the second region, the insulating layer in the first region being configured as a first insulating layer, a remaining portion of the insulating layer in the second region being configured as a second insulating layer; forming a first barrier layer covering the first insulating layer and a second barrier layer covering the second insulating layer; etching the first barrier layer, a portion of the second barrier layer and the first insulating layer to form a through hole in the first insulating layer, and to form a hole segment in the second barrier layer; and removing the first barrier layer and the second barrier layer.

Abstract: An embodiment of the present invention provides a smart feed line automation system based on 10 kV carrier communication. The system monitors smart switches of the line via 10 kV carrier communication, detects smart transformers, and calls up and returns centralized meter-reading information of smart transformer region. Furthermore, the detection of the state of a 10 kV power line may realize real-time monitoring of the temperature, insulating level and change of voltage and current of a 10 kV aerial line and cable line, and realize alarm for an abnormal state and fault information report, so as to rapidly identify, position, isolate and recover the fault.

Abstract: The utility model relates to a 3G multimedia dispatching command system, which belongs to the field of dispatching command system, comprising: a 3G public network, a dispatching platform, an access exchanger, a core exchanger, a core access gateway, a management terminal, a multimedia terminal device, an IP telephone server, and a duplex intercom server, through which a stable structure is constructed to implement a thousand-user simultaneous duplex cluster intercom without space or distance limitation, the conversation is clear without any noise, like the quality of a telephone call. The utility model also has functions of video transmission, personnel location, dispatching sound recording and mobile meeting. The communication is free of charge, the work and communication may be performed simultaneously to ensure the security, and the system can be applied in a wide range.

Abstract: An embodiment of the present invention provides a smart feed line automation system based on 10 kV carrier communication. The system monitors smart switches of the line via 10 kV carrier communication, detects smart transformers, and calls up and returns centralized meter-reading information of smart transformer region. Furthermore, the detection of the state of a 10 kV power line may realize real-time monitoring of the temperature, insulating level and change of voltage and current of a 10 kV aerial line and cable line, and realize alarm for an abnormal state and fault information report, so as to rapidly identify, position, isolate and recover the fault.

Abstract: The utility model relates to a 3G multimedia dispatching command system, which belongs to the field of dispatching command system, comprising: a 3G public network, a dispatching platform, an access exchanger, a core exchanger, a core access gateway, a management terminal, a multimedia terminal device, an IP telephone server, and a duplex intercom server, through which a stable structure is constructed to implement a thousand-user simultaneous duplex cluster intercom without space or distance limitation, the conversation is clear without any noise, like the quality of a telephone call. The utility model also has functions of video transmission, personnel location, dispatching sound recording and mobile meeting. The communication is free of charge, the work and communication may be performed simultaneously to ensure the security, and the system can be applied in a wide range.